Atomic Layer Deposition, Characterization, and Growth Mechanistic Studies of TiO2 Thin Films

Mikko Kaipio; Timothee Blanquart; Yoann Tomczak; Jaakko Niinisto; Marco Gavagnin; Valentino Longo; Heinz D. Wanzenboeck; Venkateswara R. Pallem; Christian Dussarrat; Esa Puukilainen; Mikko Ritala; Markku Leskela

doi:10.1021/la500893u

Atomic Layer Deposition, Characterization, and Growth Mechanistic Studies of TiO2 Thin Films

Mikko Kaipio, Timothee Blanquart, Yoann Tomczak, Jaakko Niinisto, Marco Gavagnin, Valentino Longo, Heinz D. Wanzenboeck, Venkateswara R. Pallem, Christian Dussarrat, Esa Puukilainen, Mikko Ritala, Markku Leskela

Department of Chemistry

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Journal	Langmuir
Volume	30
Issue number	25
Pages (from-to)	7395-7404
Number of pages	10
ISSN	0743-7463
DOIs	https://doi.org/10.1021/la500893u
Publication status	Published - 1 Jul 2014
MoE publication type	A1 Journal article-refereed

Fields of Science

IN-SITU
PRECURSOR
EPITAXY
PHOTOCATALYSIS
TRANSFORMATION
GENERATION
MORPHOLOGY
SURFACES
OXIDANT
ANATASE
116 Chemical sciences

Access to Document

10.1021/la500893u

Cite this

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title = "Atomic Layer Deposition, Characterization, and Growth Mechanistic Studies of TiO2 Thin Films",

keywords = "IN-SITU, PRECURSOR, EPITAXY, PHOTOCATALYSIS, TRANSFORMATION, GENERATION, MORPHOLOGY, SURFACES, OXIDANT, ANATASE, 116 Chemical sciences",

author = "Mikko Kaipio and Timothee Blanquart and Yoann Tomczak and Jaakko Niinisto and Marco Gavagnin and Valentino Longo and Wanzenboeck, {Heinz D.} and Pallem, {Venkateswara R.} and Christian Dussarrat and Esa Puukilainen and Mikko Ritala and Markku Leskela",

year = "2014",

month = jul,

day = "1",

doi = "10.1021/la500893u",

language = "English",

volume = "30",

pages = "7395--7404",

journal = "Langmuir",

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TY - JOUR

T1 - Atomic Layer Deposition, Characterization, and Growth Mechanistic Studies of TiO2 Thin Films

AU - Kaipio, Mikko

AU - Blanquart, Timothee

AU - Tomczak, Yoann

AU - Niinisto, Jaakko

AU - Gavagnin, Marco

AU - Longo, Valentino

AU - Wanzenboeck, Heinz D.

AU - Pallem, Venkateswara R.

AU - Dussarrat, Christian

AU - Puukilainen, Esa

AU - Ritala, Mikko

AU - Leskela, Markku

PY - 2014/7/1

Y1 - 2014/7/1

KW - IN-SITU

KW - PRECURSOR

KW - EPITAXY

KW - PHOTOCATALYSIS

KW - TRANSFORMATION

KW - GENERATION

KW - MORPHOLOGY

KW - SURFACES

KW - OXIDANT

KW - ANATASE

KW - 116 Chemical sciences

U2 - 10.1021/la500893u

DO - 10.1021/la500893u

M3 - Article

VL - 30

SP - 7395

EP - 7404

JO - Langmuir

JF - Langmuir

SN - 0743-7463

IS - 25

ER -