@article{9525f21767f748d29373220f0a473b1a,
title = "Atomic layer deposition of BaTiO3 thin films - effect of barium hydroxide formation",
keywords = "116 Chemical sciences, 114 Physical sciences, 117 Geography, Environmental sciences",
author = "Marko Vehkam{\"a}ki and Timo Hatanp{\"a}{\"a} and Mikko Ritala and Markku Leskel{\"a} and Samuli V{\"a}yrynen and Eero Rauhala",
year = "2007",
doi = "10.1002/cvde.200606538",
language = "English",
volume = "13",
pages = "239--246",
journal = "Chemical Vapor Deposition",
issn = "0948-1907",
publisher = "Wiley-VCH Verlag",
number = "5",
}