Atomic layer deposition of cobalt(II) oxide thin films from Co(BTSA)(2)(THF) and H2O

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Article number010908
JournalJournal of vacuum science & technology : an official journal of the American Vacuum Society
Volume37
Issue number1
Number of pages12
ISSN0734-2101
DOIs
Publication statusPublished - Jan 2019
MoE publication typeA1 Journal article-refereed

Fields of Science

  • COBALT OXIDE
  • Thin film
  • reaction mechanism
  • TOF-ERDA
  • XPS
  • AFM
  • 116 Chemical sciences
  • 221 Nano-technology
  • 114 Physical sciences

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