Atomic layer deposition of cobalt(II) oxide thin films from Co(BTSA)(2)(THF) and H2O

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Article number010908
JournalJournal of vacuum science & technology : an official journal of the American Vacuum Society
Volume37
Issue number1
Number of pages12
ISSN0734-2101
DOIs
Publication statusPublished - Jan 2019
MoE publication typeA1 Journal article-refereed

Fields of Science

  • COBALT OXIDE
  • Thin film
  • reaction mechanism
  • TOF-ERDA
  • XPS
  • AFM
  • 116 Chemical sciences
  • 221 Nano-technology
  • 114 Physical sciences

Cite this

@article{ff76141cda9b4f0d9a66a48d1b009325,
title = "Atomic layer deposition of cobalt(II) oxide thin films from Co(BTSA)(2)(THF) and H2O",
keywords = "COBALT OXIDE, Thin film, reaction mechanism, TOF-ERDA, XPS, AFM, 116 Chemical sciences, 221 Nano-technology, 114 Physical sciences",
author = "Tomi Iivonen and Mikko Kaipio and Timo Hatanp{\"a}{\"a} and Kenichiro Mizohata and Kristoffer Meinander and Jyrki R{\"a}is{\"a}nen and Jiyeon Kim and Mikko Ritala and Markku Leskel{\"a}",
year = "2019",
month = "1",
doi = "10.1116/1.5066638",
language = "English",
volume = "37",
journal = "Journal of vacuum science & technology : an official journal of the American Vacuum Society",
issn = "0734-2101",
publisher = "AVS",
number = "1",

}

TY - JOUR

T1 - Atomic layer deposition of cobalt(II) oxide thin films from Co(BTSA)(2)(THF) and H2O

AU - Iivonen, Tomi

AU - Kaipio, Mikko

AU - Hatanpää, Timo

AU - Mizohata, Kenichiro

AU - Meinander, Kristoffer

AU - Räisänen, Jyrki

AU - Kim, Jiyeon

AU - Ritala, Mikko

AU - Leskelä, Markku

PY - 2019/1

Y1 - 2019/1

KW - COBALT OXIDE

KW - Thin film

KW - reaction mechanism

KW - TOF-ERDA

KW - XPS

KW - AFM

KW - 116 Chemical sciences

KW - 221 Nano-technology

KW - 114 Physical sciences

U2 - 10.1116/1.5066638

DO - 10.1116/1.5066638

M3 - Article

VL - 37

JO - Journal of vacuum science & technology : an official journal of the American Vacuum Society

JF - Journal of vacuum science & technology : an official journal of the American Vacuum Society

SN - 0734-2101

IS - 1

M1 - 010908

ER -