Atomic Layer Deposition of Emerging 2D Semiconductors, HfS2 and ZrS2, for Optoelectronics

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
JournalChemistry of Materials
Volume31
Issue number15
Pages (from-to)5713-5724
Number of pages12
ISSN0897-4756
DOIs
Publication statusPublished - 13 Aug 2019
MoE publication typeA1 Journal article-refereed

Fields of Science

  • OXIDE THIN-FILMS
  • TRANSISTORS
  • CARBON
  • 116 Chemical sciences

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