Atomic Layer Deposition of Germanium Antimony Telluride Thin Films

Mikko Ritala, Viljami Pore, Timo Hatanpää, Mikko Heikkilä, Markku Leskelä, Alejandro Schrott, Simone Raoux, Stephen M. Rossnagel

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationProceedings : European/Phase Change and Ovonics Symposium, 6th-8th Septemberg, 2009 in Aachen, Germany / hosted by Dr. Martin Salinga and Prof.Dr. Matthias Wuttig
    Number of pages6
    Publication date2009
    Pages151-156
    Publication statusPublished - 2009
    MoE publication typeA4 Article in conference proceedings
    EventEuropean\Phase Change and Ovonics Symposium - Aachen, Germany
    Duration: 6 Sep 20098 Sep 2009
    Conference number: E\PCOS 2009

    Bibliographical note

    Rheinisch-Westfälische technische hochschule Aachen,;
    Phase Change and Ovonics Symposium, 6th-8th Septemberg, 2009 in Aachen, Germany / hosted by Dr. Martin Salinga and Prof.Dr. Matthias Wuttig;

    Volume:
    Proceeding volume:

    Fields of Science

    • 116 Chemical sciences

    Cite this

    Ritala, M., Pore, V., Hatanpää, T., Heikkilä, M., Leskelä, M., Schrott, A., ... Rossnagel, S. M. (2009). Atomic Layer Deposition of Germanium Antimony Telluride Thin Films. In Proceedings: European/Phase Change and Ovonics Symposium, 6th-8th Septemberg, 2009 in Aachen, Germany / hosted by Dr. Martin Salinga and Prof.Dr. Matthias Wuttig (pp. 151-156)
    Ritala, Mikko ; Pore, Viljami ; Hatanpää, Timo ; Heikkilä, Mikko ; Leskelä, Markku ; Schrott, Alejandro ; Raoux, Simone ; Rossnagel, Stephen M. / Atomic Layer Deposition of Germanium Antimony Telluride Thin Films. Proceedings: European/Phase Change and Ovonics Symposium, 6th-8th Septemberg, 2009 in Aachen, Germany / hosted by Dr. Martin Salinga and Prof.Dr. Matthias Wuttig. 2009. pp. 151-156
    @inproceedings{1f4e70f1e3aa498eb6ba014d4bc9e995,
    title = "Atomic Layer Deposition of Germanium Antimony Telluride Thin Films",
    keywords = "116 Chemical sciences",
    author = "Mikko Ritala and Viljami Pore and Timo Hatanp{\"a}{\"a} and Mikko Heikkil{\"a} and Markku Leskel{\"a} and Alejandro Schrott and Simone Raoux and Rossnagel, {Stephen M.}",
    note = "Rheinisch-Westf{\"a}lische technische hochschule Aachen,; Phase Change and Ovonics Symposium, 6th-8th Septemberg, 2009 in Aachen, Germany / hosted by Dr. Martin Salinga and Prof.Dr. Matthias Wuttig; Volume: Proceeding volume:",
    year = "2009",
    language = "English",
    pages = "151--156",
    booktitle = "Proceedings",

    }

    Ritala, M, Pore, V, Hatanpää, T, Heikkilä, M, Leskelä, M, Schrott, A, Raoux, S & Rossnagel, SM 2009, Atomic Layer Deposition of Germanium Antimony Telluride Thin Films. in Proceedings: European/Phase Change and Ovonics Symposium, 6th-8th Septemberg, 2009 in Aachen, Germany / hosted by Dr. Martin Salinga and Prof.Dr. Matthias Wuttig. pp. 151-156, European\Phase Change and Ovonics Symposium, Aachen, Germany, 06/09/2009.

    Atomic Layer Deposition of Germanium Antimony Telluride Thin Films. / Ritala, Mikko; Pore, Viljami; Hatanpää, Timo; Heikkilä, Mikko; Leskelä, Markku; Schrott, Alejandro; Raoux, Simone; Rossnagel, Stephen M.

    Proceedings: European/Phase Change and Ovonics Symposium, 6th-8th Septemberg, 2009 in Aachen, Germany / hosted by Dr. Martin Salinga and Prof.Dr. Matthias Wuttig. 2009. p. 151-156.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    TY - GEN

    T1 - Atomic Layer Deposition of Germanium Antimony Telluride Thin Films

    AU - Ritala, Mikko

    AU - Pore, Viljami

    AU - Hatanpää, Timo

    AU - Heikkilä, Mikko

    AU - Leskelä, Markku

    AU - Schrott, Alejandro

    AU - Raoux, Simone

    AU - Rossnagel, Stephen M.

    N1 - Rheinisch-Westfälische technische hochschule Aachen,; Phase Change and Ovonics Symposium, 6th-8th Septemberg, 2009 in Aachen, Germany / hosted by Dr. Martin Salinga and Prof.Dr. Matthias Wuttig; Volume: Proceeding volume:

    PY - 2009

    Y1 - 2009

    KW - 116 Chemical sciences

    M3 - Conference contribution

    SP - 151

    EP - 156

    BT - Proceedings

    ER -

    Ritala M, Pore V, Hatanpää T, Heikkilä M, Leskelä M, Schrott A et al. Atomic Layer Deposition of Germanium Antimony Telluride Thin Films. In Proceedings: European/Phase Change and Ovonics Symposium, 6th-8th Septemberg, 2009 in Aachen, Germany / hosted by Dr. Martin Salinga and Prof.Dr. Matthias Wuttig. 2009. p. 151-156