Atomic Layer Deposition of Germanium Antimony Telluride Thin Films

Mikko Ritala, Viljami Pore, Timo Hatanpää, Mikko Heikkilä, Markku Leskelä, Alejandro Schrott, Simone Raoux, Stephen M. Rossnagel

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationProceedings : European/Phase Change and Ovonics Symposium, 6th-8th Septemberg, 2009 in Aachen, Germany / hosted by Dr. Martin Salinga and Prof.Dr. Matthias Wuttig
    Number of pages6
    Publication date2009
    Pages151-156
    Publication statusPublished - 2009
    MoE publication typeA4 Article in conference proceedings
    EventEuropean\Phase Change and Ovonics Symposium - Aachen, Germany
    Duration: 6 Sep 20098 Sep 2009
    Conference number: E\PCOS 2009

    Fields of Science

    • 116 Chemical sciences

    Cite this

    Ritala, M., Pore, V., Hatanpää, T., Heikkilä, M., Leskelä, M., Schrott, A., Raoux, S., & Rossnagel, S. M. (2009). Atomic Layer Deposition of Germanium Antimony Telluride Thin Films. In Proceedings: European/Phase Change and Ovonics Symposium, 6th-8th Septemberg, 2009 in Aachen, Germany / hosted by Dr. Martin Salinga and Prof.Dr. Matthias Wuttig (pp. 151-156) http://www.epcos.org/library/papers/pdf_2009/Ritala%20et%20al%20Atomic%20Layer%20deposition.pdf