Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

Xinzhi Li; Marko Vehkamaki; Mikko Heikkila; Miika Mattinen; Matti Putkonen; Markku Leskela; Mikko Ritala

doi:10.3390/coatings11030355

Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

Xinzhi Li, Marko Vehkamaki, Mikko Heikkila, Miika Mattinen, Matti Putkonen, Markku Leskela, Mikko Ritala

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Article number	355
Journal	Coatings
Volume	11
Issue number	3
Number of pages	13
ISSN	2079-6412
DOIs	https://doi.org/10.3390/coatings11030355
Publication status	Published - Mar 2021
MoE publication type	A1 Journal article-refereed

Fields of Science

ALD
MLD
nanolaminate films
low-k materials
221 Nano-technology

Access to Document

10.3390/coatings11030355Licence: CC BY

coatings-11-00355-v2Final published version, 4.74 MBLicence: CC BY

HelsinkiALD
Putkonen, M. (Manager), Ritala, M. (Manager), Mäntymäki, M. (Operator), Kemell, M. (Operator), Vehkamäki, M. (Operator) & Heikkilä, M. (Operator)
Department of Chemistry
Facility/equipment: Research Laboratory

Cite this

@article{4a0ea631687640bbb8bf7c51f52d4060,

title = "Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films",

keywords = "ALD, MLD, nanolaminate films, low-k materials, 221 Nano-technology",

author = "Xinzhi Li and Marko Vehkamaki and Mikko Heikkila and Miika Mattinen and Matti Putkonen and Markku Leskela and Mikko Ritala",

year = "2021",

month = mar,

doi = "10.3390/coatings11030355",

language = "English",

volume = "11",

journal = "Coatings",

issn = "2079-6412",

publisher = "MDPI AG",

number = "3",

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TY - JOUR

T1 - Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

AU - Li, Xinzhi

AU - Vehkamaki, Marko

AU - Heikkila, Mikko

AU - Mattinen, Miika

AU - Putkonen, Matti

AU - Leskela, Markku

AU - Ritala, Mikko

PY - 2021/3

Y1 - 2021/3

KW - ALD

KW - MLD

KW - nanolaminate films

KW - low-k materials

KW - 221 Nano-technology

U2 - 10.3390/coatings11030355

DO - 10.3390/coatings11030355

M3 - Article

SN - 2079-6412

VL - 11

JO - Coatings

JF - Coatings

IS - 3

M1 - 355

ER -

Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

Fields of Science

Access to Document

Equipment

HelsinkiALD

Cite this