Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

Xinzhi Li, Marko Vehkamaki, Mikko Heikkila, Miika Mattinen, Matti Putkonen, Markku Leskela, Mikko Ritala

Research output: Contribution to journal › Article › Scientific › peer-review

1 results
- Title(descending)

HelsinkiALD
Putkonen, M. (Manager), Ritala, M. (Manager), Mäntymäki, M. (Operator), Kemell, M. (Operator), Vehkamäki, M. (Operator) & Heikkilä, M. (Operator)
Department of Chemistry
Facility/equipment: Research Laboratory