Atomic Layer Deposition of Intermetallic Co3Sn2 and Ni3Sn2 Thin Films

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Article number1801291
JournalAdvanced Materials Interfaces
Volume6
Issue number3
Number of pages7
ISSN2196-7350
DOIs
Publication statusPublished - Feb 2019
MoE publication typeA1 Journal article-refereed

Fields of Science

  • atomic layer deposition
  • Co3Sn2
  • intermetallics
  • Ni3Sn2
  • thin films
  • ELECTROCHEMICAL PERFORMANCE
  • CATALYTIC-PROPERTIES
  • DIFFUSION BARRIER
  • TIN-OXIDE
  • LITHIUM
  • ALLOY
  • SUPERCONDUCTIVITY
  • NANOPARTICLES
  • NANOALLOYS
  • ELECTRODES
  • 221 Nano-technology
  • 116 Chemical sciences
  • 114 Physical sciences

Cite this

@article{4a94e1daed90453c8f415ad43126cc1b,
title = "Atomic Layer Deposition of Intermetallic Co3Sn2 and Ni3Sn2 Thin Films",
keywords = "atomic layer deposition, Co3Sn2, intermetallics, Ni3Sn2, thin films, ELECTROCHEMICAL PERFORMANCE, CATALYTIC-PROPERTIES, DIFFUSION BARRIER, TIN-OXIDE, LITHIUM, ALLOY, SUPERCONDUCTIVITY, NANOPARTICLES, NANOALLOYS, ELECTRODES, 221 Nano-technology, 116 Chemical sciences, 114 Physical sciences",
author = "Katja V{\"a}yrynen and Timo Hatanp{\"a}{\"a} and Miika Mattinen and Kenichiro Mizohata and Kristoffer Meinander and Jyrki R{\"a}is{\"a}nen and Joosep Link and Raivo Stern and Mikko Ritala and Markku Leskela",
year = "2019",
month = "2",
doi = "10.1002/admi.201801291",
language = "English",
volume = "6",
journal = "Advanced Materials Interfaces",
issn = "2196-7350",
publisher = "Wiley",
number = "3",

}

Atomic Layer Deposition of Intermetallic Co3Sn2 and Ni3Sn2 Thin Films. / Väyrynen, Katja; Hatanpää, Timo; Mattinen, Miika; Mizohata, Kenichiro; Meinander, Kristoffer; Räisänen, Jyrki; Link, Joosep; Stern, Raivo; Ritala, Mikko; Leskela, Markku.

In: Advanced Materials Interfaces , Vol. 6, No. 3, 1801291, 02.2019.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Atomic Layer Deposition of Intermetallic Co3Sn2 and Ni3Sn2 Thin Films

AU - Väyrynen, Katja

AU - Hatanpää, Timo

AU - Mattinen, Miika

AU - Mizohata, Kenichiro

AU - Meinander, Kristoffer

AU - Räisänen, Jyrki

AU - Link, Joosep

AU - Stern, Raivo

AU - Ritala, Mikko

AU - Leskela, Markku

PY - 2019/2

Y1 - 2019/2

KW - atomic layer deposition

KW - Co3Sn2

KW - intermetallics

KW - Ni3Sn2

KW - thin films

KW - ELECTROCHEMICAL PERFORMANCE

KW - CATALYTIC-PROPERTIES

KW - DIFFUSION BARRIER

KW - TIN-OXIDE

KW - LITHIUM

KW - ALLOY

KW - SUPERCONDUCTIVITY

KW - NANOPARTICLES

KW - NANOALLOYS

KW - ELECTRODES

KW - 221 Nano-technology

KW - 116 Chemical sciences

KW - 114 Physical sciences

U2 - 10.1002/admi.201801291

DO - 10.1002/admi.201801291

M3 - Article

VL - 6

JO - Advanced Materials Interfaces

JF - Advanced Materials Interfaces

SN - 2196-7350

IS - 3

M1 - 1801291

ER -