@inproceedings{117a9660c97d4c6ebaa6e68206cf5fbd,
title = "Atomic Layer Deposition of Molybdenum Nitride Films",
keywords = "116 Chemical sciences",
author = "Petra Alen and Mikko Ritala and Markku Leskel{\"a}",
year = "2005",
language = "English",
isbn = "1558998144",
series = "MRS Conference Proceedings Series",
publisher = "Materials Research Society",
pages = "763--768",
editor = "Darrell Erb",
booktitle = "Advanced Metallization Conference 2004 (AMC 2004)",
address = "United States",
note = "Advanced Metallization Conference ; Conference date: 21-10-2004 Through 21-10-2004",
}