| Original language | English |
|---|---|
| Title of host publication | Advanced Metallization Conference 2004 (AMC 2004) |
| Editors | Darrell Erb |
| Number of pages | 6 |
| Publisher | Materials Research Society |
| Publication date | 2005 |
| Pages | 763-768 |
| ISBN (Print) | 1558998144 |
| Publication status | Published - 2005 |
| MoE publication type | A4 Article in conference proceedings |
| Event | Advanced Metallization Conference - San Diego, United States Duration: 21 Oct 2004 → 21 Oct 2004 |
Publication series
| Name | MRS Conference Proceedings Series |
|---|---|
| Volume | 20 |
Fields of Science
- 116 Chemical sciences
Cite this
Alen, P., Ritala, M., & Leskelä, M. (2005). Atomic Layer Deposition of Molybdenum Nitride Films. In D. Erb (Ed.), Advanced Metallization Conference 2004 (AMC 2004) (pp. 763-768). (MRS Conference Proceedings Series; Vol. 20). Materials Research Society.