| Original language | English |
|---|---|
| Title of host publication | Advanced Metallization Conference 2004 (AMC 2004) |
| Editors | Darrell Erb |
| Number of pages | 6 |
| Publisher | Materials Research Society |
| Publication date | 2005 |
| Pages | 763-768 |
| ISBN (Print) | 1558998144 |
| Publication status | Published - 2005 |
| MoE publication type | A4 Article in conference proceedings |
| Event | Advanced Metallization Conference - San Diego, United States Duration: 21 Oct 2004 → 21 Oct 2004 |
Publication series
| Name | MRS Conference Proceedings Series |
|---|---|
| Volume | 20 |
Fields of Science
- 116 Chemical sciences
Cite this
Alen, P., Ritala, M., & Leskelä, M. (2005). Atomic Layer Deposition of Molybdenum Nitride Films. In D. Erb (Ed.), Advanced Metallization Conference 2004 (AMC 2004) (pp. 763-768). (MRS Conference Proceedings Series; Vol. 20). Materials Research Society.
@inproceedings{117a9660c97d4c6ebaa6e68206cf5fbd,
title = "Atomic Layer Deposition of Molybdenum Nitride Films",
keywords = "116 Chemical sciences",
author = "Petra Alen and Mikko Ritala and Markku Leskel{\"a}",
note = "Volume: Proceeding volume:",
year = "2005",
language = "English",
isbn = "1558998144",
series = "MRS Conference Proceedings Series",
publisher = "Materials Research Society",
pages = "763--768",
editor = "Darrell Erb",
booktitle = "Advanced Metallization Conference 2004 (AMC 2004)",
address = "United States",
}
Alen, P, Ritala, M & Leskelä, M 2005, Atomic Layer Deposition of Molybdenum Nitride Films. in D Erb (ed.), Advanced Metallization Conference 2004 (AMC 2004). MRS Conference Proceedings Series, vol. 20, Materials Research Society, pp. 763-768, Advanced Metallization Conference, San Diego, United States, 21/10/2004.
Atomic Layer Deposition of Molybdenum Nitride Films. / Alen, Petra; Ritala, Mikko; Leskelä, Markku.
Advanced Metallization Conference 2004 (AMC 2004). ed. / Darrell Erb. Materials Research Society, 2005. p. 763-768 (MRS Conference Proceedings Series; Vol. 20).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review
TY - GEN
T1 - Atomic Layer Deposition of Molybdenum Nitride Films
AU - Alen, Petra
AU - Ritala, Mikko
AU - Leskelä, Markku
N1 - Volume: Proceeding volume:
PY - 2005
Y1 - 2005
KW - 116 Chemical sciences
M3 - Conference contribution
SN - 1558998144
T3 - MRS Conference Proceedings Series
SP - 763
EP - 768
BT - Advanced Metallization Conference 2004 (AMC 2004)
A2 - Erb, Darrell
PB - Materials Research Society
ER -
Alen P, Ritala M, Leskelä M. Atomic Layer Deposition of Molybdenum Nitride Films. In Erb D, editor, Advanced Metallization Conference 2004 (AMC 2004). Materials Research Society. 2005. p. 763-768. (MRS Conference Proceedings Series).