Atomic Layer Deposition of Molybdenum Nitride Films

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationAdvanced Metallization Conference 2004 (AMC 2004)
    EditorsDarrell Erb
    Number of pages6
    PublisherMaterials Research Society
    Publication date2005
    Pages763-768
    ISBN (Print)1558998144
    Publication statusPublished - 2005
    MoE publication typeA4 Article in conference proceedings
    EventAdvanced Metallization Conference - San Diego, United States
    Duration: 21 Oct 200421 Oct 2004

    Publication series

    NameMRS Conference Proceedings Series
    Volume20

    Fields of Science

    • 116 Chemical sciences

    Cite this

    Alen, P., Ritala, M., & Leskelä, M. (2005). Atomic Layer Deposition of Molybdenum Nitride Films. In D. Erb (Ed.), Advanced Metallization Conference 2004 (AMC 2004) (pp. 763-768). (MRS Conference Proceedings Series; Vol. 20). Materials Research Society.