Atomic Layer Deposition of Molybdenum Nitride Films

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationAdvanced Metallization Conference 2004 (AMC 2004)
    EditorsDarrell Erb
    Number of pages6
    PublisherMaterials Research Society
    Publication date2005
    Pages763-768
    ISBN (Print)1558998144
    Publication statusPublished - 2005
    MoE publication typeA4 Article in conference proceedings
    EventAdvanced Metallization Conference - San Diego, United States
    Duration: 21 Oct 200421 Oct 2004

    Publication series

    NameMRS Conference Proceedings Series
    Volume20

    Fields of Science

    • 116 Chemical sciences

    Cite this

    Alen, P., Ritala, M., & Leskelä, M. (2005). Atomic Layer Deposition of Molybdenum Nitride Films. In D. Erb (Ed.), Advanced Metallization Conference 2004 (AMC 2004) (pp. 763-768). (MRS Conference Proceedings Series; Vol. 20). Materials Research Society.
    Alen, Petra ; Ritala, Mikko ; Leskelä, Markku. / Atomic Layer Deposition of Molybdenum Nitride Films. Advanced Metallization Conference 2004 (AMC 2004). editor / Darrell Erb. Materials Research Society, 2005. pp. 763-768 (MRS Conference Proceedings Series).
    @inproceedings{117a9660c97d4c6ebaa6e68206cf5fbd,
    title = "Atomic Layer Deposition of Molybdenum Nitride Films",
    keywords = "116 Chemical sciences",
    author = "Petra Alen and Mikko Ritala and Markku Leskel{\"a}",
    note = "Volume: Proceeding volume:",
    year = "2005",
    language = "English",
    isbn = "1558998144",
    series = "MRS Conference Proceedings Series",
    publisher = "Materials Research Society",
    pages = "763--768",
    editor = "Darrell Erb",
    booktitle = "Advanced Metallization Conference 2004 (AMC 2004)",
    address = "United States",

    }

    Alen, P, Ritala, M & Leskelä, M 2005, Atomic Layer Deposition of Molybdenum Nitride Films. in D Erb (ed.), Advanced Metallization Conference 2004 (AMC 2004). MRS Conference Proceedings Series, vol. 20, Materials Research Society, pp. 763-768, Advanced Metallization Conference, San Diego, United States, 21/10/2004.

    Atomic Layer Deposition of Molybdenum Nitride Films. / Alen, Petra; Ritala, Mikko; Leskelä, Markku.

    Advanced Metallization Conference 2004 (AMC 2004). ed. / Darrell Erb. Materials Research Society, 2005. p. 763-768 (MRS Conference Proceedings Series; Vol. 20).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    TY - GEN

    T1 - Atomic Layer Deposition of Molybdenum Nitride Films

    AU - Alen, Petra

    AU - Ritala, Mikko

    AU - Leskelä, Markku

    N1 - Volume: Proceeding volume:

    PY - 2005

    Y1 - 2005

    KW - 116 Chemical sciences

    M3 - Conference contribution

    SN - 1558998144

    T3 - MRS Conference Proceedings Series

    SP - 763

    EP - 768

    BT - Advanced Metallization Conference 2004 (AMC 2004)

    A2 - Erb, Darrell

    PB - Materials Research Society

    ER -

    Alen P, Ritala M, Leskelä M. Atomic Layer Deposition of Molybdenum Nitride Films. In Erb D, editor, Advanced Metallization Conference 2004 (AMC 2004). Materials Research Society. 2005. p. 763-768. (MRS Conference Proceedings Series).