Atomic Layer Deposition of Molybdenum Nitride Films

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationAdvanced Metallization Conference 2004 (AMC 2004)
EditorsDarrell Erb
Number of pages6
PublisherMaterials Research Society
Publication date2005
Pages763-768
ISBN (Print)1558998144
Publication statusPublished - 2005
MoE publication typeA4 Article in conference proceedings
EventAdvanced Metallization Conference - San Diego, United States
Duration: 21 Oct 200421 Oct 2004

Publication series

NameMRS Conference Proceedings Series
Volume20

Fields of Science

  • 116 Chemical sciences

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