Atomic Layer Deposition of Noble Metals

Titta Aaltonen, Mikko Ritala, Markku Leskelä

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Advanced Metallization Conference 2004
    EditorsD. Erb, P. Ramm, K. Masu, A. Osaki
    Number of pages5
    Place of PublicationWarrensdale, PA
    PublisherMaterials Research Society
    Publication date2005
    Pages663-667
    ISBN (Print)1558998144
    Publication statusPublished - 2005
    MoE publication typeA4 Article in conference proceedings
    Event21st Advanced Metallization Conference - San Diego, United States
    Duration: 19 Oct 200421 Oct 2004
    Conference number: AMC 2004

    Publication series

    NameMRS Conference Proceedings Series
    Volume20

    Fields of Science

    • 116 Chemical sciences

    Cite this

    Aaltonen, T., Ritala, M., & Leskelä, M. (2005). Atomic Layer Deposition of Noble Metals. In D. Erb, P. Ramm, K. Masu, & A. Osaki (Eds.), Proceedings of Advanced Metallization Conference 2004 (pp. 663-667). (MRS Conference Proceedings Series; Vol. 20). Warrensdale, PA: Materials Research Society.
    Aaltonen, Titta ; Ritala, Mikko ; Leskelä, Markku. / Atomic Layer Deposition of Noble Metals. Proceedings of Advanced Metallization Conference 2004. editor / D. Erb ; P. Ramm ; K. Masu ; A. Osaki. Warrensdale, PA : Materials Research Society, 2005. pp. 663-667 (MRS Conference Proceedings Series).
    @inproceedings{cd8f190a33fa440fa612e631a4bf3e6d,
    title = "Atomic Layer Deposition of Noble Metals",
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    author = "Titta Aaltonen and Mikko Ritala and Markku Leskel{\"a}",
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    year = "2005",
    language = "English",
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    series = "MRS Conference Proceedings Series",
    publisher = "Materials Research Society",
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    Aaltonen, T, Ritala, M & Leskelä, M 2005, Atomic Layer Deposition of Noble Metals. in D Erb, P Ramm, K Masu & A Osaki (eds), Proceedings of Advanced Metallization Conference 2004. MRS Conference Proceedings Series, vol. 20, Materials Research Society, Warrensdale, PA, pp. 663-667, 21st Advanced Metallization Conference, San Diego, United States, 19/10/2004.

    Atomic Layer Deposition of Noble Metals. / Aaltonen, Titta; Ritala, Mikko; Leskelä, Markku.

    Proceedings of Advanced Metallization Conference 2004. ed. / D. Erb; P. Ramm; K. Masu; A. Osaki. Warrensdale, PA : Materials Research Society, 2005. p. 663-667 (MRS Conference Proceedings Series; Vol. 20).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    TY - GEN

    T1 - Atomic Layer Deposition of Noble Metals

    AU - Aaltonen, Titta

    AU - Ritala, Mikko

    AU - Leskelä, Markku

    N1 - Volume: Proceeding volume:

    PY - 2005

    Y1 - 2005

    KW - 116 Chemical sciences

    M3 - Conference contribution

    SN - 1558998144

    T3 - MRS Conference Proceedings Series

    SP - 663

    EP - 667

    BT - Proceedings of Advanced Metallization Conference 2004

    A2 - Erb, D.

    A2 - Ramm, P.

    A2 - Masu, K.

    A2 - Osaki, A.

    PB - Materials Research Society

    CY - Warrensdale, PA

    ER -

    Aaltonen T, Ritala M, Leskelä M. Atomic Layer Deposition of Noble Metals. In Erb D, Ramm P, Masu K, Osaki A, editors, Proceedings of Advanced Metallization Conference 2004. Warrensdale, PA: Materials Research Society. 2005. p. 663-667. (MRS Conference Proceedings Series).