@article{e4b774232a1b43c0952a530474e2699d,
title = "Atomic layer deposition of TbF3 thin films",
keywords = "114 Physical sciences, 116 Chemical sciences",
author = "Elisa Atosuo and Juha Ojala and Heikkila, {Mikko J.} and Miika Mattinen and Kenichiro Mizohata and Jyrki Raisanen and Markku Leskela and Mikko Ritala",
year = "2021",
month = mar,
doi = "10.1116/6.0000790",
language = "English",
volume = "39",
journal = "Journal of vacuum science & technology : an official journal of the American Vacuum Society",
issn = "0734-2101",
publisher = "AVS",
number = "2",
}