Atomic layer deposition of thin films for microelectronics

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	English
Journal	Proceedings - Electrochemical Society
Issue number	8
Pages (from-to)	479-490
ISSN	0161-6374
Publication status	Published - 2003
MoE publication type	A4 Article in conference proceedings
Event	Unknown host publication - , United States Duration: 1 Jan 1800 → …

Fields of Science

@article{80db1215ba604e14ad3882f9ce3cc27e,

title = "Atomic layer deposition of thin films for microelectronics",

keywords = "116 Chemical sciences",

author = "Mikko Ritala and Markku Leskel{\"a}",

year = "2003",

language = "English",

pages = "479--490",

journal = "Proceedings - Electrochemical Society",

issn = "0161-6374",

publisher = "Electrochemical society",

number = "8",

note = "Unknown host publication ; Conference date: 01-01-1800",

}

TY - JOUR

T1 - Atomic layer deposition of thin films for microelectronics

AU - Ritala, Mikko

AU - Leskelä, Markku

PY - 2003

Y1 - 2003

KW - 116 Chemical sciences

M3 - Conference article

SN - 0161-6374

SP - 479

EP - 490

JO - Proceedings - Electrochemical Society

JF - Proceedings - Electrochemical Society

IS - 8

T2 - Unknown host publication

Y2 - 1 January 1800

ER -