Atomic Layer Deposition of Zinc Glutarate Thin Films

Research output: Contribution to journalArticleScientificpeer-review

Abstract

Deposition of zinc glutarate thin films by atomic layer deposition is studied at 200-250 degrees C using zinc acetate and glutaric acid as the precursors. The films are characterized by UV-vis spectrophotometry, X-ray diffraction, Fourier transform infrared spectroscopy, field emission scanning electron microscopy, energy-dispersive X-ray spectroscopy, atomic force microscopy, and time-of-flight elastic recoil detection analysis. According to X-ray diffraction, the films deposited at 200 degrees C are crystalline with a crystal structure matching to zinc glutarate. The elastic recoil detection analysis shows that the composition of the films is a close match to zinc glutarate. Catalytic activity of the films is demonstrated using the copolymerization reaction of propylene oxide and CO2
Original languageEnglish
Article number1700512
JournalAdvanced Materials Interfaces
Volume4
Issue number22
Number of pages6
ISSN2196-7350
DOIs
Publication statusPublished - Sep 2017
MoE publication typeA1 Journal article-refereed

Fields of Science

  • 116 Chemical sciences
  • 221 Nano-technology
  • 216 Materials engineering

Cite this

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title = "Atomic Layer Deposition of Zinc Glutarate Thin Films",
abstract = "Deposition of zinc glutarate thin films by atomic layer deposition is studied at 200-250 degrees C using zinc acetate and glutaric acid as the precursors. The films are characterized by UV-vis spectrophotometry, X-ray diffraction, Fourier transform infrared spectroscopy, field emission scanning electron microscopy, energy-dispersive X-ray spectroscopy, atomic force microscopy, and time-of-flight elastic recoil detection analysis. According to X-ray diffraction, the films deposited at 200 degrees C are crystalline with a crystal structure matching to zinc glutarate. The elastic recoil detection analysis shows that the composition of the films is a close match to zinc glutarate. Catalytic activity of the films is demonstrated using the copolymerization reaction of propylene oxide and CO2",
keywords = "116 Chemical sciences, 221 Nano-technology, 216 Materials engineering",
author = "Salmi, {Leo Daniel} and Mattinen, {Miika Juhana} and Niemi, {Teemu Yrj{\"o} Manuel} and Heikkil{\"a}, {Mikko Juhani} and Kenichiro Mizohata and Sanna Korhonen and Sami-Pekka Hirvonen and R{\"a}is{\"a}nen, {Jyrki Antero} and Ritala, {Mikko Kalervo}",
year = "2017",
month = "9",
doi = "10.1002/admi.201700512",
language = "English",
volume = "4",
journal = "Advanced Materials Interfaces",
issn = "2196-7350",
publisher = "Wiley",
number = "22",

}

Atomic Layer Deposition of Zinc Glutarate Thin Films. / Salmi, Leo Daniel; Mattinen, Miika Juhana; Niemi, Teemu Yrjö Manuel; Heikkilä, Mikko Juhani; Mizohata, Kenichiro; Korhonen, Sanna; Hirvonen, Sami-Pekka; Räisänen, Jyrki Antero; Ritala, Mikko Kalervo.

In: Advanced Materials Interfaces , Vol. 4, No. 22, 1700512 , 09.2017.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Atomic Layer Deposition of Zinc Glutarate Thin Films

AU - Salmi, Leo Daniel

AU - Mattinen, Miika Juhana

AU - Niemi, Teemu Yrjö Manuel

AU - Heikkilä, Mikko Juhani

AU - Mizohata, Kenichiro

AU - Korhonen, Sanna

AU - Hirvonen, Sami-Pekka

AU - Räisänen, Jyrki Antero

AU - Ritala, Mikko Kalervo

PY - 2017/9

Y1 - 2017/9

N2 - Deposition of zinc glutarate thin films by atomic layer deposition is studied at 200-250 degrees C using zinc acetate and glutaric acid as the precursors. The films are characterized by UV-vis spectrophotometry, X-ray diffraction, Fourier transform infrared spectroscopy, field emission scanning electron microscopy, energy-dispersive X-ray spectroscopy, atomic force microscopy, and time-of-flight elastic recoil detection analysis. According to X-ray diffraction, the films deposited at 200 degrees C are crystalline with a crystal structure matching to zinc glutarate. The elastic recoil detection analysis shows that the composition of the films is a close match to zinc glutarate. Catalytic activity of the films is demonstrated using the copolymerization reaction of propylene oxide and CO2

AB - Deposition of zinc glutarate thin films by atomic layer deposition is studied at 200-250 degrees C using zinc acetate and glutaric acid as the precursors. The films are characterized by UV-vis spectrophotometry, X-ray diffraction, Fourier transform infrared spectroscopy, field emission scanning electron microscopy, energy-dispersive X-ray spectroscopy, atomic force microscopy, and time-of-flight elastic recoil detection analysis. According to X-ray diffraction, the films deposited at 200 degrees C are crystalline with a crystal structure matching to zinc glutarate. The elastic recoil detection analysis shows that the composition of the films is a close match to zinc glutarate. Catalytic activity of the films is demonstrated using the copolymerization reaction of propylene oxide and CO2

KW - 116 Chemical sciences

KW - 221 Nano-technology

KW - 216 Materials engineering

U2 - 10.1002/admi.201700512

DO - 10.1002/admi.201700512

M3 - Article

VL - 4

JO - Advanced Materials Interfaces

JF - Advanced Materials Interfaces

SN - 2196-7350

IS - 22

M1 - 1700512

ER -