Atomic Layer Deposition of Zinc Oxide on Mesoporous Zirconia Using Zinc(II) Acetylacetonate and Air

Jihong Yim; Eero Haimi; Miia Mäntymäki; Ville Kärkäs; René Bes; Aitor Arandia Gutierrez; Kristoffer Meinander; Philipp Brüner; Thomas Grehl; Lars Gell; Tiia Viinikainen; Karoliina Honkala; Simo Huotari; Reetta Karinen; Matti Putkonen; Riikka L. Puurunen

doi:10.1021/acs.chemmater.3c00668

Atomic Layer Deposition of Zinc Oxide on Mesoporous Zirconia Using Zinc(II) Acetylacetonate and Air

Jihong Yim, Eero Haimi, Miia Mäntymäki, Ville Kärkäs, René Bes, Aitor Arandia Gutierrez, Kristoffer Meinander, Philipp Brüner, Thomas Grehl, Lars Gell, Tiia Viinikainen, Karoliina Honkala, Simo Huotari, Reetta Karinen, Matti Putkonen, Riikka L. Puurunen

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Article number	3c00668
Journal	Chemistry of Materials
Volume	35
Issue number	19
Pages (from-to)	7915–7930
Number of pages	16
ISSN	0897-4756
DOIs	https://doi.org/10.1021/acs.chemmater.3c00668
Publication status	Published - 10 Oct 2023
MoE publication type	A1 Journal article-refereed

Fields of Science

116 Chemical sciences
114 Physical sciences

Access to Document

10.1021/acs.chemmater.3c00668Licence: CC BY

yim-et-al-2023-atomic-layer-deposition-of-zinc-oxide-on-mesoporous-zirconia-using-zinc(ii)-acetylacetonate-and-airFinal published version, 4.79 MBLicence: CC BY

Center for X-ray Spectroscopy
Huotari, S. (Manager) & Bes, R. (Manager)
Department of Physics
Facility/equipment: Research Laboratory
HelsinkiALD
Putkonen, M. (Manager), Ritala, M. (Manager), Mäntymäki, M. (Operator), Kemell, M. (Operator), Vehkamäki, M. (Operator) & Heikkilä, M. (Operator)
Department of Chemistry
Facility/equipment: Research Laboratory
X-ray Laboratory
Huotari, S. (Manager)
Department of Physics
Facility/equipment: Research Laboratory

Cite this

Yim, J., Haimi, E., Mäntymäki, M., Kärkäs, V., Bes, R., Gutierrez, A. A., Meinander, K., Brüner, P., Grehl, T., Gell, L., Viinikainen, T., Honkala, K., Huotari, S., Karinen, R., Putkonen, M., & Puurunen, R. L. (2023). Atomic Layer Deposition of Zinc Oxide on Mesoporous Zirconia Using Zinc(II) Acetylacetonate and Air. Chemistry of Materials, 35(19), 7915–7930. Article 3c00668. https://doi.org/10.1021/acs.chemmater.3c00668

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title = "Atomic Layer Deposition of Zinc Oxide on Mesoporous Zirconia Using Zinc(II) Acetylacetonate and Air",

keywords = "116 Chemical sciences, 114 Physical sciences",

author = "Jihong Yim and Eero Haimi and Miia M{\"a}ntym{\"a}ki and Ville K{\"a}rk{\"a}s and Ren{\'e} Bes and Gutierrez, {Aitor Arandia} and Kristoffer Meinander and Philipp Br{\"u}ner and Thomas Grehl and Lars Gell and Tiia Viinikainen and Karoliina Honkala and Simo Huotari and Reetta Karinen and Matti Putkonen and Puurunen, {Riikka L.}",

year = "2023",

month = oct,

day = "10",

doi = "10.1021/acs.chemmater.3c00668",

language = "English",

volume = "35",

pages = "7915–7930",

journal = "Chemistry of Materials",

issn = "0897-4756",

publisher = "American Chemical Society",

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}

Yim, J, Haimi, E, Mäntymäki, M, Kärkäs, V, Bes, R, Gutierrez, AA, Meinander, K, Brüner, P, Grehl, T, Gell, L, Viinikainen, T, Honkala, K, Huotari, S, Karinen, R, Putkonen, M & Puurunen, RL 2023, 'Atomic Layer Deposition of Zinc Oxide on Mesoporous Zirconia Using Zinc(II) Acetylacetonate and Air', Chemistry of Materials, vol. 35, no. 19, 3c00668, pp. 7915–7930. https://doi.org/10.1021/acs.chemmater.3c00668

TY - JOUR

T1 - Atomic Layer Deposition of Zinc Oxide on Mesoporous Zirconia Using Zinc(II) Acetylacetonate and Air

AU - Yim, Jihong

AU - Haimi, Eero

AU - Mäntymäki, Miia

AU - Kärkäs, Ville

AU - Bes, René

AU - Gutierrez, Aitor Arandia

AU - Meinander, Kristoffer

AU - Brüner, Philipp

AU - Grehl, Thomas

AU - Gell, Lars

AU - Viinikainen, Tiia

AU - Honkala, Karoliina

AU - Huotari, Simo

AU - Karinen, Reetta

AU - Putkonen, Matti

AU - Puurunen, Riikka L.

PY - 2023/10/10

Y1 - 2023/10/10

KW - 116 Chemical sciences

KW - 114 Physical sciences

U2 - 10.1021/acs.chemmater.3c00668

DO - 10.1021/acs.chemmater.3c00668

M3 - Article

SN - 0897-4756

VL - 35

SP - 7915

EP - 7930

JO - Chemistry of Materials

JF - Chemistry of Materials

IS - 19

M1 - 3c00668

ER -

Atomic Layer Deposition of Zinc Oxide on Mesoporous Zirconia Using Zinc(II) Acetylacetonate and Air

Fields of Science

Access to Document

Equipment

Center for X-ray Spectroscopy

HelsinkiALD

X-ray Laboratory

Cite this