Atomic-layer deposition of ZrO2 thin films using new alkoxide precursors

Anthony C Jones, Paul A Williams, John L Roberts, Timothy J Leedham, Hywel O Davies, Raija Matero, Mikko Ritala, Markku Leskelä

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationMaterials Research Society symposia proceedings
    Place of PublicationNew York, NY
    PublisherNorth-Holland
    Publication date2002
    Pages145-150
    Publication statusPublished - 2002
    MoE publication typeA4 Article in conference proceedings

    Publication series

    NameMaterials Research Society Proceedings
    Volume716

    Fields of Science

    • 116 Chemical sciences

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