Beneq Oy, University of Jyväskylä and University of Helsinki Effects of ALD TiN on the Abrasion Resistance of Three Stainless Steel Grades

V. Malinen; Matti Putkonen; T. Sajavaara; M. Kemell; E. Puukilainen; M. Ritala; M. Leskelä

Beneq Oy, University of Jyväskylä and University of Helsinki Effects of ALD TiN on the Abrasion Resistance of Three Stainless Steel Grades

V. Malinen, Matti Putkonen, T. Sajavaara, M. Kemell, E. Puukilainen, M. Ritala, M. Leskelä

Research output: Book/Report › Commissioned report

Original language	English

Publication status	Published - 2009
Externally published	Yes
MoE publication type	D4 Published development or research report or study

HelsinkiALD
Putkonen, M. (Manager), Ritala, M. (Manager), Mäntymäki, M. (Operator), Kemell, M. (Operator), Vehkamäki, M. (Operator) & Heikkilä, M. (Operator)
Department of Chemistry
Facility/equipment: Research Laboratory

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title = "Beneq Oy, University of Jyv{\"a}skyl{\"a} and University of Helsinki Effects of ALD TiN on the Abrasion Resistance of Three Stainless Steel Grades",

author = "V. Malinen and Matti Putkonen and T. Sajavaara and M. Kemell and E. Puukilainen and M. Ritala and M. Leskel{\"a}",

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language = "English",

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TY - BOOK

T1 - Beneq Oy, University of Jyväskylä and University of Helsinki Effects of ALD TiN on the Abrasion Resistance of Three Stainless Steel Grades

AU - Malinen, V.

AU - Putkonen, Matti

AU - Sajavaara, T.

AU - Kemell, M.

AU - Puukilainen, E.

AU - Ritala, M.

AU - Leskelä, M.

PY - 2009

Y1 - 2009

M3 - Commissioned report

BT - Beneq Oy, University of Jyväskylä and University of Helsinki Effects of ALD TiN on the Abrasion Resistance of Three Stainless Steel Grades

ER -

Beneq Oy, University of Jyväskylä and University of Helsinki Effects of ALD TiN on the Abrasion Resistance of Three Stainless Steel Grades

Equipment

HelsinkiALD

Cite this