| Original language | English |
|---|---|
| Title of host publication | Atomic Layer Deposition of Nanostructured Materials |
| Editors | Nicola Pinna, Mato Knez |
| Number of pages | 23 |
| Publisher | Wiley-VCH |
| Publication date | 2011 |
| Pages | 401-422 |
| ISBN (Print) | 3-527-32797-5, 978-3-527-32797-3 |
| Publication status | Published - 2011 |
| MoE publication type | B2 Book chapter |
Fields of Science
- 116 Chemical sciences