Challenges in ALD.

Research output: Chapter in Book/Report/Conference proceedingChapterScientific

Original languageEnglish
Title of host publicationAtomic Layer Deposition of Nanostructured Materials
EditorsNicola Pinna, Mato Knez
Number of pages23
PublisherWiley-VCH
Publication date2011
Pages401-422
ISBN (Print)3-527-32797-5, 978-3-527-32797-3
Publication statusPublished - 2011
MoE publication typeB2 Book chapter

Fields of Science

  • 116 Chemical sciences

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