| Original language | English |
|---|---|
| Title of host publication | Atomic Layer Deposition of Nanostructured Materials |
| Editors | Nicola Pinna, Mato Knez |
| Number of pages | 23 |
| Publisher | Wiley-VCH |
| Publication date | 2011 |
| Pages | 401-422 |
| ISBN (Print) | 3-527-32797-5, 978-3-527-32797-3 |
| Publication status | Published - 2011 |
| MoE publication type | B2 Book chapter |
Fields of Science
- 116 Chemical sciences
Cite this
Leskelä, M. (2011). Challenges in ALD. In N. Pinna, & M. Knez (Eds.), Atomic Layer Deposition of Nanostructured Materials (pp. 401-422). Wiley-VCH.
@inbook{65d77489594f47a0a0279bfa05b4d65b,
title = "Challenges in ALD.",
keywords = "116 Chemical sciences",
author = "Markku Leskel{\"a}",
year = "2011",
language = "English",
isbn = "3-527-32797-5",
pages = "401--422",
editor = "Nicola Pinna and Mato Knez",
booktitle = "Atomic Layer Deposition of Nanostructured Materials",
publisher = "Wiley-VCH",
address = "Germany",
}
Leskelä, M 2011, Challenges in ALD. in N Pinna & M Knez (eds), Atomic Layer Deposition of Nanostructured Materials. Wiley-VCH, pp. 401-422.
Challenges in ALD. / Leskelä, Markku.
Atomic Layer Deposition of Nanostructured Materials. ed. / Nicola Pinna; Mato Knez. Wiley-VCH, 2011. p. 401-422.Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific
TY - CHAP
T1 - Challenges in ALD.
AU - Leskelä, Markku
PY - 2011
Y1 - 2011
KW - 116 Chemical sciences
M3 - Chapter
SN - 3-527-32797-5
SN - 978-3-527-32797-3
SP - 401
EP - 422
BT - Atomic Layer Deposition of Nanostructured Materials
A2 - Pinna, Nicola
A2 - Knez, Mato
PB - Wiley-VCH
ER -
Leskelä M. Challenges in ALD. In Pinna N, Knez M, editors, Atomic Layer Deposition of Nanostructured Materials. Wiley-VCH. 2011. p. 401-422