Challenges in ALD.

Research output: Chapter in Book/Report/Conference proceedingChapterScientific

Original languageEnglish
Title of host publicationAtomic Layer Deposition of Nanostructured Materials
EditorsNicola Pinna, Mato Knez
Number of pages23
PublisherWiley-VCH
Publication date2011
Pages401-422
ISBN (Print)3-527-32797-5, 978-3-527-32797-3
Publication statusPublished - 2011
MoE publication typeB2 Book chapter

Fields of Science

  • 116 Chemical sciences

Cite this

Leskelä, M. (2011). Challenges in ALD. In N. Pinna, & M. Knez (Eds.), Atomic Layer Deposition of Nanostructured Materials (pp. 401-422). Wiley-VCH.
Leskelä, Markku. / Challenges in ALD. Atomic Layer Deposition of Nanostructured Materials. editor / Nicola Pinna ; Mato Knez. Wiley-VCH, 2011. pp. 401-422
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language = "English",
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editor = "Nicola Pinna and Mato Knez",
booktitle = "Atomic Layer Deposition of Nanostructured Materials",
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address = "Germany",

}

Leskelä, M 2011, Challenges in ALD. in N Pinna & M Knez (eds), Atomic Layer Deposition of Nanostructured Materials. Wiley-VCH, pp. 401-422.

Challenges in ALD. / Leskelä, Markku.

Atomic Layer Deposition of Nanostructured Materials. ed. / Nicola Pinna; Mato Knez. Wiley-VCH, 2011. p. 401-422.

Research output: Chapter in Book/Report/Conference proceedingChapterScientific

TY - CHAP

T1 - Challenges in ALD.

AU - Leskelä, Markku

PY - 2011

Y1 - 2011

KW - 116 Chemical sciences

M3 - Chapter

SN - 3-527-32797-5

SN - 978-3-527-32797-3

SP - 401

EP - 422

BT - Atomic Layer Deposition of Nanostructured Materials

A2 - Pinna, Nicola

A2 - Knez, Mato

PB - Wiley-VCH

ER -

Leskelä M. Challenges in ALD. In Pinna N, Knez M, editors, Atomic Layer Deposition of Nanostructured Materials. Wiley-VCH. 2011. p. 401-422