Original language | English |
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Title of host publication | Atomic Layer Deposition of Nanostructured Materials |
Editors | Nicola Pinna, Mato Knez |
Number of pages | 23 |
Publisher | Wiley-VCH |
Publication date | 2011 |
Pages | 401-422 |
ISBN (Print) | 3-527-32797-5, 978-3-527-32797-3 |
Publication status | Published - 2011 |
MoE publication type | B2 Book chapter |
Fields of Science
- 116 Chemical sciences
Equipment
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HelsinkiALD
Putkonen, M. (Manager), Ritala, M. (Manager), Mäntymäki, M. (Operator), Kemell, M. (Operator), Vehkamäki, M. (Operator) & Heikkilä, M. (Operator)
Department of ChemistryFacility/equipment: Research Laboratory