Challenges in ALD.

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific

Original language	English
Title of host publication	Atomic Layer Deposition of Nanostructured Materials
Editors	Nicola Pinna, Mato Knez
Number of pages	23
Publisher	Wiley-VCH
Publication date	2011
Pages	401-422
ISBN (Print)	3-527-32797-5, 978-3-527-32797-3
Publication status	Published - 2011
MoE publication type	B2 Book chapter

Fields of Science

HelsinkiALD
Putkonen, M. (Manager), Ritala, M. (Manager), Mäntymäki, M. (Operator), Kemell, M. (Operator), Vehkamäki, M. (Operator) & Heikkilä, M. (Operator)
Department of Chemistry
Facility/equipment: Research Laboratory

@inbook{65d77489594f47a0a0279bfa05b4d65b,

title = "Challenges in ALD.",

keywords = "116 Chemical sciences",

author = "Markku Leskel{\"a}",

year = "2011",

language = "English",

isbn = "3-527-32797-5",

pages = "401--422",

editor = "Nicola Pinna and Mato Knez",

booktitle = "Atomic Layer Deposition of Nanostructured Materials",

publisher = "Wiley-VCH",

address = "Germany",

}