Channeling in manufacturing sharp junctions: a molecular dynamics study

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	English
Journal	Physica Scripta
Volume	T79
Pages (from-to)	272-274
Number of pages	3
ISSN	0031-8949
Publication status	Published - 1999
MoE publication type	A4 Article in conference proceedings
Event	Unknown host publication - , United Kingdom Duration: 1 Jan 1800 → …

Fields of Science

@article{44f6eca8994241ddb2f559acd2f5830d,

title = "Channeling in manufacturing sharp junctions: a molecular dynamics study",

keywords = "STOPPING-POWER MODEL, SILICON, IMPLANTATION, SIMULATION, 114 Physical sciences, 117 Geography, Environmental sciences",

author = "J Sillanpaa and K Nordlund and J Keinonen",

note = " Volume: T79 ; Unknown host publication ; Conference date: 01-01-1800",

year = "1999",

language = "English",

volume = "T79",

pages = "272--274",

journal = "Physica Scripta",

issn = "0031-8949",

publisher = "Addison-Wesley",

}

TY - JOUR

T1 - Channeling in manufacturing sharp junctions: a molecular dynamics study

AU - Sillanpaa, J

AU - Nordlund, K

AU - Keinonen, J

N1 - Volume: T79

PY - 1999

Y1 - 1999

KW - STOPPING-POWER MODEL

KW - SILICON

KW - IMPLANTATION

KW - SIMULATION

KW - 114 Physical sciences

KW - 117 Geography, Environmental sciences

M3 - Conference article

SN - 0031-8949

VL - T79

SP - 272

EP - 274

JO - Physica Scripta

JF - Physica Scripta

T2 - Unknown host publication

Y2 - 1 January 1800

ER -