Characterization of Nanolaminate Thickness using Multi-Parametric Surface Plasmon Resonance

Johana Kuncova-Kallio, Annika Jokinen, Janusz W. Sadowski, Niko Granqvist

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publication2013 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO)
EditorsA Sill, R Liu, W Li
Number of pages5
Publication date2013
Pages259-263
Publication statusPublished - 2013
MoE publication typeA4 Article in conference proceedings
EventINTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE -
Duration: 1 Jan 1800 → …

Publication series

NameInternational Conference on Manipulation Manufacturing and Measurement on the Nanoscale
PublisherIEEE
ISSN (Print)2373-5422

Fields of Science

  • multi-parametric surface plasmon resonance
  • refractive index
  • thickness
  • thin film deposition
  • absorbing film
  • nanolaminate
  • SPR
  • characterization
  • ellipsometry
  • Langmuir-Blodgett
  • ALD
  • CVD
  • SPECTROSCOPIC ELLIPSOMETRY
  • FILMS
  • 317 Pharmacy

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