Comparative study on the use of novel heteroleptic cyclopentadienyl-based zirconium precursors with H2O and O-3 for atomic layer deposition of ZrO2

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Article number020912
JournalJournal of vacuum science & technology : an official journal of the American Vacuum Society
Volume37
Issue number2
Number of pages8
ISSN0734-2101
DOIs
Publication statusPublished - Mar 2019
MoE publication typeA1 Journal article-refereed

Fields of Science

  • THIN-FILMS
  • OXIDE
  • WATER
  • 221 Nano-technology
  • 116 Chemical sciences

Cite this

@article{7b5f0d9b9c21404582925a308ee8fb03,
title = "Comparative study on the use of novel heteroleptic cyclopentadienyl-based zirconium precursors with H2O and O-3 for atomic layer deposition of ZrO2",
keywords = "THIN-FILMS, OXIDE, WATER, 221 Nano-technology, 116 Chemical sciences",
author = "Sanni Sepp{\"a}l{\"a} and Marko Vehkam{\"a}ki and Kenichiro Mizohata and Wontae Noh and Jyrki R{\"a}is{\"a}nen and Mikko Ritala and Markku Leskel{\"a}",
year = "2019",
month = "3",
doi = "10.1116/1.5079539",
language = "English",
volume = "37",
journal = "Journal of vacuum science & technology : an official journal of the American Vacuum Society",
issn = "0734-2101",
publisher = "AVS",
number = "2",

}

TY - JOUR

T1 - Comparative study on the use of novel heteroleptic cyclopentadienyl-based zirconium precursors with H2O and O-3 for atomic layer deposition of ZrO2

AU - Seppälä, Sanni

AU - Vehkamäki, Marko

AU - Mizohata, Kenichiro

AU - Noh, Wontae

AU - Räisänen, Jyrki

AU - Ritala, Mikko

AU - Leskelä, Markku

PY - 2019/3

Y1 - 2019/3

KW - THIN-FILMS

KW - OXIDE

KW - WATER

KW - 221 Nano-technology

KW - 116 Chemical sciences

U2 - 10.1116/1.5079539

DO - 10.1116/1.5079539

M3 - Article

VL - 37

JO - Journal of vacuum science & technology : an official journal of the American Vacuum Society

JF - Journal of vacuum science & technology : an official journal of the American Vacuum Society

SN - 0734-2101

IS - 2

M1 - 020912

ER -