Crystal-orientation-dependent physical sputtering from four elemental metals

M. Balden; K. Schlueter; D. Dhard; P. Bauer; R. Nilsson; F. Granberg; K. Nordlund; G. Hobler

doi:10.1016/j.nme.2023.101559

Crystal-orientation-dependent physical sputtering from four elemental metals

M. Balden, K. Schlueter, D. Dhard, P. Bauer, R. Nilsson, F. Granberg, K. Nordlund, G. Hobler

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Article number	101559
Journal	Nuclear Materials and Energy
Volume	37
Number of pages	9
ISSN	2352-1791
DOIs	https://doi.org/10.1016/j.nme.2023.101559
Publication status	Published - Dec 2023
MoE publication type	A1 Journal article-refereed

Fields of Science

Physical sputtering yield
Crystallinity
Electron backscattering diffraction (EBSD)
Focused ion beam (FIB)
Molecular dynamics (MD) simulations
Binary collision approximation (BCA) simulations
114 Physical sciences

Access to Document

10.1016/j.nme.2023.101559Licence: CC BY

1-s2.0-S2352179123001989-mainFinal published version, 8.47 MBLicence: CC BY

Cite this

@article{b15eb5067dae4471988162271002443b,

title = "Crystal-orientation-dependent physical sputtering from four elemental metals",

keywords = "Physical sputtering yield, Crystallinity, Electron backscattering diffraction (EBSD), Focused ion beam (FIB), Molecular dynamics (MD) simulations, Binary collision approximation (BCA) simulations, 114 Physical sciences",

author = "M. Balden and K. Schlueter and D. Dhard and P. Bauer and R. Nilsson and F. Granberg and K. Nordlund and G. Hobler",

year = "2023",

month = dec,

doi = "10.1016/j.nme.2023.101559",

language = "English",

volume = "37",

journal = "Nuclear Materials and Energy",

issn = "2352-1791",

publisher = "Elsevier Ltd. ",

}

TY - JOUR

T1 - Crystal-orientation-dependent physical sputtering from four elemental metals

AU - Balden, M.

AU - Schlueter, K.

AU - Dhard, D.

AU - Bauer, P.

AU - Nilsson, R.

AU - Granberg, F.

AU - Nordlund, K.

AU - Hobler, G.

PY - 2023/12

Y1 - 2023/12

KW - Physical sputtering yield

KW - Crystallinity

KW - Electron backscattering diffraction (EBSD)

KW - Focused ion beam (FIB)

KW - Molecular dynamics (MD) simulations

KW - Binary collision approximation (BCA) simulations

KW - 114 Physical sciences

U2 - 10.1016/j.nme.2023.101559

DO - 10.1016/j.nme.2023.101559

M3 - Article

SN - 2352-1791

VL - 37

JO - Nuclear Materials and Energy

JF - Nuclear Materials and Energy

M1 - 101559

ER -