Crystalline tungsten sulfide thin films by atomic layer deposition and mild annealing

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Article number020921
JournalJournal of vacuum science & technology : an official journal of the American Vacuum Society
Volume37
Issue number2
Number of pages9
ISSN0734-2101
DOIs
Publication statusPublished - Mar 2019
MoE publication typeA1 Journal article-refereed

Fields of Science

  • TRANSITION-METAL DICHALCOGENIDES
  • 2-DIMENSIONAL MATERIALS
  • WAFER-SCALE
  • WS2 LAYERS
  • DISULFIDE
  • GROWTH
  • MONOLAYER
  • PRECURSOR
  • PERFORMANCE
  • NANOSHEETS
  • 114 Physical sciences
  • 221 Nano-technology

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