Crystalline tungsten sulfide thin films by atomic layer deposition and mild annealing

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Article number020921
JournalJournal of vacuum science & technology : an official journal of the American Vacuum Society
Volume37
Issue number2
Number of pages9
ISSN0734-2101
DOIs
Publication statusPublished - Mar 2019
MoE publication typeA1 Journal article-refereed

Fields of Science

  • TRANSITION-METAL DICHALCOGENIDES
  • 2-DIMENSIONAL MATERIALS
  • WAFER-SCALE
  • WS2 LAYERS
  • DISULFIDE
  • GROWTH
  • MONOLAYER
  • PRECURSOR
  • PERFORMANCE
  • NANOSHEETS
  • 114 Physical sciences
  • 221 Nano-technology

Cite this

@article{e56d982f005c4753b8cfed1d2a5c493a,
title = "Crystalline tungsten sulfide thin films by atomic layer deposition and mild annealing",
keywords = "TRANSITION-METAL DICHALCOGENIDES, 2-DIMENSIONAL MATERIALS, WAFER-SCALE, WS2 LAYERS, DISULFIDE, GROWTH, MONOLAYER, PRECURSOR, PERFORMANCE, NANOSHEETS, 114 Physical sciences, 221 Nano-technology",
author = "Miika Mattinen and Timo Hatanp{\"a}{\"a} and King, {Peter J.} and Kristoffer Meinander and Kenichiro Mizohata and Pasi Jalkanen and Jyrki R{\"a}is{\"a}nen and Mikko Ritala and Markku Leskel{\"a}",
year = "2019",
month = "3",
doi = "10.1116/1.5074153",
language = "English",
volume = "37",
journal = "Journal of vacuum science & technology : an official journal of the American Vacuum Society",
issn = "0734-2101",
publisher = "AVS",
number = "2",

}

TY - JOUR

T1 - Crystalline tungsten sulfide thin films by atomic layer deposition and mild annealing

AU - Mattinen, Miika

AU - Hatanpää, Timo

AU - King, Peter J.

AU - Meinander, Kristoffer

AU - Mizohata, Kenichiro

AU - Jalkanen, Pasi

AU - Räisänen, Jyrki

AU - Ritala, Mikko

AU - Leskelä, Markku

PY - 2019/3

Y1 - 2019/3

KW - TRANSITION-METAL DICHALCOGENIDES

KW - 2-DIMENSIONAL MATERIALS

KW - WAFER-SCALE

KW - WS2 LAYERS

KW - DISULFIDE

KW - GROWTH

KW - MONOLAYER

KW - PRECURSOR

KW - PERFORMANCE

KW - NANOSHEETS

KW - 114 Physical sciences

KW - 221 Nano-technology

U2 - 10.1116/1.5074153

DO - 10.1116/1.5074153

M3 - Article

VL - 37

JO - Journal of vacuum science & technology : an official journal of the American Vacuum Society

JF - Journal of vacuum science & technology : an official journal of the American Vacuum Society

SN - 0734-2101

IS - 2

M1 - 020921

ER -