DAMAGE PRODUCTION IN HYDROGEN-IMPLANTED SILICON

J LAHTINEN, A VEHANEN, E PUNKKA, P HAUTOJARVI, J KEINONEN, M HAUTALA, E RAUHALA, KARTTUNEN, A KURONEN, J RAISANEN

Research output: Contribution to journalConference articleScientific

Original languageEnglish
JournalSurface and Interface Analysis
Volume12
Issue number1-12
Pages (from-to)325-326
Number of pages2
ISSN0142-2421
Publication statusPublished - Jul 1988
MoE publication typeB3 Article in conference proceedings

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