DAMAGE PRODUCTION IN HYDROGEN-IMPLANTED SILICON

J LAHTINEN, A VEHANEN, E PUNKKA, P HAUTOJARVI, J KEINONEN, M HAUTALA, E RAUHALA, KARTTUNEN, A KURONEN, J RAISANEN

Research output: Contribution to journalConference articleScientific

Original languageEnglish
JournalSurface and Interface Analysis
Volume12
Issue number1-12
Pages (from-to)325-326
Number of pages2
ISSN0142-2421
Publication statusPublished - Jul 1988
MoE publication typeB3 Article in conference proceedings

Cite this

LAHTINEN, J ; VEHANEN, A ; PUNKKA, E ; HAUTOJARVI, P ; KEINONEN, J ; HAUTALA, M ; RAUHALA, E ; KARTTUNEN, ; KURONEN, A ; RAISANEN, J. / DAMAGE PRODUCTION IN HYDROGEN-IMPLANTED SILICON. In: Surface and Interface Analysis. 1988 ; Vol. 12, No. 1-12. pp. 325-326.
@article{d046391e795045038919566daad61b44,
title = "DAMAGE PRODUCTION IN HYDROGEN-IMPLANTED SILICON",
author = "J LAHTINEN and A VEHANEN and E PUNKKA and P HAUTOJARVI and J KEINONEN and M HAUTALA and E RAUHALA and KARTTUNEN and A KURONEN and J RAISANEN",
note = "Volume: 12 Proceeding volume:",
year = "1988",
month = "7",
language = "English",
volume = "12",
pages = "325--326",
journal = "Surface and Interface Analysis",
issn = "0142-2421",
publisher = "John Wiley & Sons Ltd.",
number = "1-12",

}

DAMAGE PRODUCTION IN HYDROGEN-IMPLANTED SILICON. / LAHTINEN, J; VEHANEN, A; PUNKKA, E; HAUTOJARVI, P; KEINONEN, J; HAUTALA, M; RAUHALA, E; KARTTUNEN, ; KURONEN, A; RAISANEN, J.

In: Surface and Interface Analysis, Vol. 12, No. 1-12, 07.1988, p. 325-326.

Research output: Contribution to journalConference articleScientific

TY - JOUR

T1 - DAMAGE PRODUCTION IN HYDROGEN-IMPLANTED SILICON

AU - LAHTINEN, J

AU - VEHANEN, A

AU - PUNKKA, E

AU - HAUTOJARVI, P

AU - KEINONEN, J

AU - HAUTALA, M

AU - RAUHALA, E

AU - KARTTUNEN, null

AU - KURONEN, A

AU - RAISANEN, J

N1 - Volume: 12 Proceeding volume:

PY - 1988/7

Y1 - 1988/7

M3 - Conference article

VL - 12

SP - 325

EP - 326

JO - Surface and Interface Analysis

JF - Surface and Interface Analysis

SN - 0142-2421

IS - 1-12

ER -