DAMAGE PRODUCTION IN HYDROGEN-IMPLANTED SILICON

J LAHTINEN; A VEHANEN; E PUNKKA; P HAUTOJARVI; J KEINONEN; M HAUTALA; E RAUHALA; KARTTUNEN; A KURONEN; J RAISANEN

DAMAGE PRODUCTION IN HYDROGEN-IMPLANTED SILICON

J LAHTINEN, A VEHANEN, E PUNKKA, P HAUTOJARVI, J KEINONEN, M HAUTALA, E RAUHALA, KARTTUNEN, A KURONEN, J RAISANEN

Research output: Contribution to journal › Conference article › Scientific

Original language	English
Journal	Surface and Interface Analysis
Volume	12
Issue number	1-12
Pages (from-to)	325-326
Number of pages	2
ISSN	0142-2421
Publication status	Published - Jul 1988
MoE publication type	B3 Article in conference proceedings

Cite this

@article{d046391e795045038919566daad61b44,

title = "DAMAGE PRODUCTION IN HYDROGEN-IMPLANTED SILICON",

author = "J LAHTINEN and A VEHANEN and E PUNKKA and P HAUTOJARVI and J KEINONEN and M HAUTALA and E RAUHALA and KARTTUNEN and A KURONEN and J RAISANEN",

note = " Volume: 12 ",

year = "1988",

month = jul,

language = "English",

volume = "12",

pages = "325--326",

journal = "Surface and Interface Analysis",

issn = "0142-2421",

publisher = "John Wiley and Sons Ltd",

number = "1-12",

}

TY - JOUR

T1 - DAMAGE PRODUCTION IN HYDROGEN-IMPLANTED SILICON

AU - LAHTINEN, J

AU - VEHANEN, A

AU - PUNKKA, E

AU - HAUTOJARVI, P

AU - KEINONEN, J

AU - HAUTALA, M

AU - RAUHALA, E

AU - KARTTUNEN, null

AU - KURONEN, A

AU - RAISANEN, J

N1 - Volume: 12

PY - 1988/7

Y1 - 1988/7

UR - https://www.scopus.com/pages/publications/0024035865

M3 - Conference article

SN - 0142-2421

VL - 12

SP - 325

EP - 326

JO - Surface and Interface Analysis

JF - Surface and Interface Analysis

IS - 1-12

ER -

DAMAGE PRODUCTION IN HYDROGEN-IMPLANTED SILICON

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