Defect and density evolution under high-fluence ion irradiation of Si/SiO2 heterostructures

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Article number013601
JournalPhysical Review Materials
Volume4
Issue number1
Number of pages12
ISSN2475-9953
DOIs
Publication statusPublished - 3 Jan 2020
MoE publication typeA1 Journal article-refereed

Fields of Science

  • SINGLE-ELECTRON TRANSISTOR
  • SILICON QUANTUM-DOT
  • MOLECULAR-DYNAMICS
  • SI NANOCRYSTALS
  • NANOCLUSTER FORMATION
  • LAYER FORMATION
  • BEAM SYNTHESIS
  • SIMULATION
  • RADIATION
  • DENSIFICATION
  • 114 Physical sciences

Cite this

@article{f8cf47fc294e412ea24e032e78f08983,
title = "Defect and density evolution under high-fluence ion irradiation of Si/SiO2 heterostructures",
keywords = "SINGLE-ELECTRON TRANSISTOR, SILICON QUANTUM-DOT, MOLECULAR-DYNAMICS, SI NANOCRYSTALS, NANOCLUSTER FORMATION, LAYER FORMATION, BEAM SYNTHESIS, SIMULATION, RADIATION, DENSIFICATION, 114 Physical sciences",
author = "F. Djurabekova and C. Fridlund and K. Nordlund",
year = "2020",
month = "1",
day = "3",
doi = "10.1103/PhysRevMaterials.4.013601",
language = "English",
volume = "4",
journal = "Physical Review Materials",
issn = "2475-9953",
publisher = "AVS",
number = "1",

}

Defect and density evolution under high-fluence ion irradiation of Si/SiO2 heterostructures. / Djurabekova, F.; Fridlund, C.; Nordlund, K.

In: Physical Review Materials, Vol. 4, No. 1, 013601, 03.01.2020.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Defect and density evolution under high-fluence ion irradiation of Si/SiO2 heterostructures

AU - Djurabekova, F.

AU - Fridlund, C.

AU - Nordlund, K.

PY - 2020/1/3

Y1 - 2020/1/3

KW - SINGLE-ELECTRON TRANSISTOR

KW - SILICON QUANTUM-DOT

KW - MOLECULAR-DYNAMICS

KW - SI NANOCRYSTALS

KW - NANOCLUSTER FORMATION

KW - LAYER FORMATION

KW - BEAM SYNTHESIS

KW - SIMULATION

KW - RADIATION

KW - DENSIFICATION

KW - 114 Physical sciences

U2 - 10.1103/PhysRevMaterials.4.013601

DO - 10.1103/PhysRevMaterials.4.013601

M3 - Article

VL - 4

JO - Physical Review Materials

JF - Physical Review Materials

SN - 2475-9953

IS - 1

M1 - 013601

ER -