Device and method for measuring an optical thickness of a layer

Ivan Vladislavov Kassamakov, Risto Matti Kalevi Montonen, Edward Olof Haeggström, Antti Kontiola, Ari Henrik Salmi

Research output: PatentScientific

Original languageEnglish
Publication Year2018
Publication statusPublished - 2018
MoE publication typeNot Eligible

Cite this

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title = "Device and method for measuring an optical thickness of a layer",
author = "Kassamakov, {Ivan Vladislavov} and Montonen, {Risto Matti Kalevi} and Haeggstr{\"o}m, {Edward Olof} and Antti Kontiola and Salmi, {Ari Henrik}",
year = "2018",
language = "English",
type = "Patent",
note = "WO2018011466A1",

}

Device and method for measuring an optical thickness of a layer. / Kassamakov, Ivan Vladislavov; Montonen, Risto Matti Kalevi; Haeggström, Edward Olof; Kontiola, Antti; Salmi, Ari Henrik.

Patent No.: WO2018011466A1.

Research output: PatentScientific

TY - PAT

T1 - Device and method for measuring an optical thickness of a layer

AU - Kassamakov, Ivan Vladislavov

AU - Montonen, Risto Matti Kalevi

AU - Haeggström, Edward Olof

AU - Kontiola, Antti

AU - Salmi, Ari Henrik

PY - 2018

Y1 - 2018

M3 - Patent

M1 - WO2018011466A1

ER -