Diamine Adduct of Cobalt(II) Chloride as a Precursor for Atomic Layer Deposition of Stoichiometric Cobalt(II) Oxide and Reduction Thereof to Cobalt Metal Thin Films

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
JournalChemistry of Materials
Volume30
Issue number10
Pages (from-to)3499-3507
Number of pages9
ISSN0897-4756
DOIs
Publication statusPublished - 22 May 2018
MoE publication typeA1 Journal article-refereed

Fields of Science

  • PLASMA ALD METHOD
  • WATER OXIDATION
  • BIS(N-TERT-BUTYL-N'-ETHYLPROPIONAMIDINATO) COBALT(II)
  • CYCLOPENTADIENYLCOBALT DICARBONYL
  • DICOBALT OCTACARBONYL
  • TRANSITION-METALS
  • CRYSTAL-STRUCTURE
  • OXYGEN EVOLUTION
  • COMPLEXES
  • CO
  • 116 Chemical sciences
  • 114 Physical sciences
  • 221 Nano-technology

Cite this

@article{f4f438b58eac46fe8034e23784a4eda4,
title = "Diamine Adduct of Cobalt(II) Chloride as a Precursor for Atomic Layer Deposition of Stoichiometric Cobalt(II) Oxide and Reduction Thereof to Cobalt Metal Thin Films",
keywords = "PLASMA ALD METHOD, WATER OXIDATION, BIS(N-TERT-BUTYL-N'-ETHYLPROPIONAMIDINATO) COBALT(II), CYCLOPENTADIENYLCOBALT DICARBONYL, DICOBALT OCTACARBONYL, TRANSITION-METALS, CRYSTAL-STRUCTURE, OXYGEN EVOLUTION, COMPLEXES, CO, 116 Chemical sciences, 114 Physical sciences, 221 Nano-technology",
author = "Katja V{\"a}yrynen and Timo Hatanp{\"a}{\"a} and Miika Mattinen and Mikko Heikkil{\"a} and Kenichiro Mizohata and Kristoffer Meinander and Jyrki R{\"a}is{\"a}nen and Mikko Ritala and Markku Leskel{\"a}",
year = "2018",
month = "5",
day = "22",
doi = "10.1021/acs.chemmater.8b01271",
language = "English",
volume = "30",
pages = "3499--3507",
journal = "Chemistry of Materials",
issn = "0897-4756",
publisher = "American Chemical Society",
number = "10",

}

TY - JOUR

T1 - Diamine Adduct of Cobalt(II) Chloride as a Precursor for Atomic Layer Deposition of Stoichiometric Cobalt(II) Oxide and Reduction Thereof to Cobalt Metal Thin Films

AU - Väyrynen, Katja

AU - Hatanpää, Timo

AU - Mattinen, Miika

AU - Heikkilä, Mikko

AU - Mizohata, Kenichiro

AU - Meinander, Kristoffer

AU - Räisänen, Jyrki

AU - Ritala, Mikko

AU - Leskelä, Markku

PY - 2018/5/22

Y1 - 2018/5/22

KW - PLASMA ALD METHOD

KW - WATER OXIDATION

KW - BIS(N-TERT-BUTYL-N'-ETHYLPROPIONAMIDINATO) COBALT(II)

KW - CYCLOPENTADIENYLCOBALT DICARBONYL

KW - DICOBALT OCTACARBONYL

KW - TRANSITION-METALS

KW - CRYSTAL-STRUCTURE

KW - OXYGEN EVOLUTION

KW - COMPLEXES

KW - CO

KW - 116 Chemical sciences

KW - 114 Physical sciences

KW - 221 Nano-technology

U2 - 10.1021/acs.chemmater.8b01271

DO - 10.1021/acs.chemmater.8b01271

M3 - Article

VL - 30

SP - 3499

EP - 3507

JO - Chemistry of Materials

JF - Chemistry of Materials

SN - 0897-4756

IS - 10

ER -