@article{5e7100f5be214bf2b97860c2deb18d84,
title = "Dynamic evaluation of lateral and vertical displacement of thermally actuated MEMS devices",
keywords = "114 Physical sciences",
author = "Kalle Hanhij{\"a}rvi and Juha Aaltonen and Ivan Kassamakov and Lauri Sainiemi and Kestutis Grigoras and Sami Franssila and Edward Haeggstr{\"o}m",
note = " Volume: 7389 Host publication title: Proceedings of SPIE Host publication sub-title: Optical Measurement Systems for Industrial Inspection VI Proceeding volume: 2009 / 7389; Optical Measurement Systems for Industrial Inspection VI ; Conference date: 15-06-2009",
year = "2009",
doi = "10.1117/12.827522",
language = "English",
volume = "7389",
pages = "73892Z",
journal = "Proceedings of SPIE, the International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",
}