Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test

Ville Rontu, Anton Nolvi, Ari Hokkanen, Edward Haeggström, Ivan Kassamakov, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Article number046411
JournalMaterials Research Express
Volume5
Issue number4
Number of pages10
ISSN2053-1591
DOIs
Publication statusPublished - Apr 2018
MoE publication typeA1 Journal article-refereed

Fields of Science

  • atomic layer deposition
  • bulge testing
  • mechanical properties
  • membrane
  • fracture strength
  • ATOMIC LAYER DEPOSITION
  • ALUMINUM-OXIDE
  • THERMOMECHANICAL PROPERTIES
  • SILICA
  • STRESS
  • STRENGTH
  • MODULUS
  • MASK
  • 114 Physical sciences
  • 116 Chemical sciences

Cite this

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title = "Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test",
keywords = "atomic layer deposition, bulge testing, mechanical properties, membrane, fracture strength, ATOMIC LAYER DEPOSITION, ALUMINUM-OXIDE, THERMOMECHANICAL PROPERTIES, SILICA, STRESS, STRENGTH, MODULUS, MASK, 114 Physical sciences, 116 Chemical sciences",
author = "Ville Rontu and Anton Nolvi and Ari Hokkanen and Edward Haeggstr{\"o}m and Ivan Kassamakov and Sami Franssila",
year = "2018",
month = "4",
doi = "10.1088/2053-1591/aabbd5",
language = "English",
volume = "5",
journal = "Materials Research Express",
issn = "2053-1591",
publisher = "IOP Publishing",
number = "4",

}

Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test. / Rontu, Ville; Nolvi, Anton; Hokkanen, Ari; Haeggström, Edward; Kassamakov, Ivan; Franssila, Sami.

In: Materials Research Express, Vol. 5, No. 4, 046411, 04.2018.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test

AU - Rontu, Ville

AU - Nolvi, Anton

AU - Hokkanen, Ari

AU - Haeggström, Edward

AU - Kassamakov, Ivan

AU - Franssila, Sami

PY - 2018/4

Y1 - 2018/4

KW - atomic layer deposition

KW - bulge testing

KW - mechanical properties

KW - membrane

KW - fracture strength

KW - ATOMIC LAYER DEPOSITION

KW - ALUMINUM-OXIDE

KW - THERMOMECHANICAL PROPERTIES

KW - SILICA

KW - STRESS

KW - STRENGTH

KW - MODULUS

KW - MASK

KW - 114 Physical sciences

KW - 116 Chemical sciences

U2 - 10.1088/2053-1591/aabbd5

DO - 10.1088/2053-1591/aabbd5

M3 - Article

VL - 5

JO - Materials Research Express

JF - Materials Research Express

SN - 2053-1591

IS - 4

M1 - 046411

ER -