Projects per year
Abstract
We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.
Original language | English |
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Article number | 10330 0A |
Journal | Proceedings of SPIE, the International Society for Optical Engineering |
Volume | 10330 |
Number of pages | 7 |
ISSN | 0277-786X |
DOIs | |
Publication status | Published - 2017 |
MoE publication type | A4 Article in conference proceedings |
Event | Conference on Modeling Aspects in Optical Metrology - Munich, Germany Duration: 26 Jun 2017 → 28 Jun 2017 Conference number: VI |
Fields of Science
- 114 Physical sciences
Projects
- 1 Finished
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ERC Advanced Grant project SAEMPL (No. 320733)
Muinonen, K., Peltoniemi, J., Penttilä, A., Markkanen, J., Zubko, E., Pentikäinen, H., Guirado Rodriguez, D., Gritsevich, M., Kassamakov, I., Harju, J., Pelkonen, V., Väisänen, T., Martikainen, J., Herranen, J., Maconi, G., Helander, P. & Rantakylä, J.
01/04/2013 → 31/03/2018
Project: Research project