Abstract
| Original language | English |
|---|---|
| Article number | 10330 0A |
| Journal | Proceedings of SPIE, the International Society for Optical Engineering |
| Volume | 10330 |
| Number of pages | 7 |
| ISSN | 0277-786X |
| DOIs | |
| Publication status | Published - 2017 |
| MoE publication type | A4 Article in conference proceedings |
| Event | Conference on Modeling Aspects in Optical Metrology - Munich, Germany Duration: 26 Jun 2017 → 28 Jun 2017 Conference number: VI |
Fields of Science
- 114 Physical sciences
Cite this
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Experimental light scattering by small particles : First results with a novel Mueller matrix scatterometer. / Penttilä, Antti; Maconi, Göran; Kassamakov, Ivan; Gritsevich, Maria; Helander, Petteri; Puranen, Tuomas; Haeggström, Edward; Muinonen, Karri.
In: Proceedings of SPIE, the International Society for Optical Engineering, Vol. 10330, 10330 0A, 2017.Research output: Contribution to journal › Conference article › Scientific › peer-review
TY - JOUR
T1 - Experimental light scattering by small particles
T2 - First results with a novel Mueller matrix scatterometer
AU - Penttilä, Antti
AU - Maconi, Göran
AU - Kassamakov, Ivan
AU - Gritsevich, Maria
AU - Helander, Petteri
AU - Puranen, Tuomas
AU - Haeggström, Edward
AU - Muinonen, Karri
N1 - Volume: 10330 Host publication title: Modeling Aspects in Optical Metrology VI Proceeding volume: Isbn(print): 978-1-5106-1106-1 Isbn(electronic): 978-1-5106-1105-4
PY - 2017
Y1 - 2017
N2 - We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.
AB - We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.
KW - 114 Physical sciences
U2 - 10.1117/12.2267863
DO - 10.1117/12.2267863
M3 - Conference article
VL - 10330
JO - Proceedings of SPIE, the International Society for Optical Engineering
JF - Proceedings of SPIE, the International Society for Optical Engineering
SN - 0277-786X
M1 - 10330 0A
ER -