Experimental light scattering by small particles: First results with a novel Mueller matrix scatterometer

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We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.
Original languageEnglish
Article number10330 0A
JournalProceedings of SPIE, the International Society for Optical Engineering
Number of pages7
Publication statusPublished - 2017
MoE publication typeA4 Article in conference proceedings
EventConference on Modeling Aspects in Optical Metrology - Munich, Germany
Duration: 26 Jun 201728 Jun 2017
Conference number: VI

Fields of Science

  • 114 Physical sciences

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