Experimental light scattering by small particles: First results with a novel Mueller matrix scatterometer

Antti Penttilä; Göran Maconi; Ivan Kassamakov; Maria Gritsevich; Petteri Helander; Tuomas Puranen; Edward Haeggström; Karri Muinonen

doi:10.1117/12.2267863

Experimental light scattering by small particles: First results with a novel Mueller matrix scatterometer

Antti Penttilä, Göran Maconi, Ivan Kassamakov, Maria Gritsevich, Petteri Helander, Tuomas Puranen, Edward Haeggström, Karri Muinonen

Research output: Contribution to journal › Conference article › Scientific › peer-review

Abstract

We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.

Original language	English
Article number	10330 0A
Journal	Proceedings of SPIE, the International Society for Optical Engineering
Volume	10330
Number of pages	7
ISSN	0277-786X
DOIs	https://doi.org/10.1117/12.2267863
Publication status	Published - 2017
MoE publication type	A4 Article in conference proceedings
Event	Conference on Modeling Aspects in Optical Metrology - Munich, Germany Duration: 26 Jun 2017 → 28 Jun 2017 Conference number: VI

Fields of Science

114 Physical sciences

Access to Document

10.1117/12.2267863

Draft copyAccepted author manuscript, 3.21 MB

1 Finished

ERC Advanced Grant project SAEMPL (No. 320733)
Muinonen, K., Peltoniemi, J., Penttilä, A., Markkanen, J., Zubko, E., Pentikäinen, H., Guirado Rodriguez, D., Gritsevich, M., Kassamakov, I., Harju, J., Pelkonen, V., Väisänen, T., Martikainen, J., Herranen, J., Maconi, G., Helander, P. & Rantakylä, J.
01/04/2013 → 31/03/2018
Project: Research project

Cite this

@article{2934b393d4494ef3adc073eb0344be35,

title = "Experimental light scattering by small particles: First results with a novel Mueller matrix scatterometer",

abstract = "We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.",

keywords = "114 Physical sciences",

author = "Antti Penttil{\"a} and G{\"o}ran Maconi and Ivan Kassamakov and Maria Gritsevich and Petteri Helander and Tuomas Puranen and Edward Haeggstr{\"o}m and Karri Muinonen",

note = " Volume: 10330 Host publication title: Modeling Aspects in Optical Metrology VI Proceeding volume: Isbn(print): 978-1-5106-1106-1 Isbn(electronic): 978-1-5106-1105-4; Conference on Modeling Aspects in Optical Metrology ; Conference date: 26-06-2017 Through 28-06-2017",

year = "2017",

doi = "10.1117/12.2267863",

language = "English",

volume = "10330",

journal = "Proceedings of SPIE, the International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE, The International Society for Optical Engineering",

}

Experimental light scattering by small particles : First results with a novel Mueller matrix scatterometer. / Penttilä, Antti ; Maconi, Göran ; Kassamakov, Ivan ; Gritsevich, Maria; Helander, Petteri; Puranen, Tuomas; Haeggström, Edward ; Muinonen, Karri.

In: Proceedings of SPIE, the International Society for Optical Engineering, Vol. 10330, 10330 0A, 2017.

Research output: Contribution to journal › Conference article › Scientific › peer-review

TY - JOUR

T1 - Experimental light scattering by small particles

T2 - Conference on Modeling Aspects in Optical Metrology

AU - Penttilä, Antti

AU - Maconi, Göran

AU - Kassamakov, Ivan

AU - Gritsevich, Maria

AU - Helander, Petteri

AU - Puranen, Tuomas

AU - Haeggström, Edward

AU - Muinonen, Karri

N1 - Conference code: VI

PY - 2017

Y1 - 2017

N2 - We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.

AB - We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.

KW - 114 Physical sciences

U2 - 10.1117/12.2267863

DO - 10.1117/12.2267863

M3 - Conference article

VL - 10330

JO - Proceedings of SPIE, the International Society for Optical Engineering

JF - Proceedings of SPIE, the International Society for Optical Engineering

SN - 0277-786X

M1 - 10330 0A

Y2 - 26 June 2017 through 28 June 2017

ER -

Experimental light scattering by small particles: First results with a novel Mueller matrix scatterometer

Abstract

Fields of Science

Access to Document

ERC Advanced Grant project SAEMPL (No. 320733)

Cite this