Fabrication of GaN-air channels for embedded photonic structures

Marta Sawicka, Oliwia Golyga, Natalia Fiuczek, Grzegorz Muziol, Anna Feduniewicz-Zmuda, Marcin Siekacz, Henryk Turski, Robert Czernecki, Ewa Grzanka, Igor Prozheev, Filip Tuomisto, Czeslaw Skierbiszewski

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Article number107234
JournalMaterials Science in Semiconductor Processing
Volume155
Number of pages6
ISSN1369-8001
DOIs
Publication statusPublished - 1 Mar 2023
MoE publication typeA1 Journal article-refereed

Fields of Science

  • Electrochemical etching
  • Gallium nitride
  • High index contrast
  • Ion implantation
  • Optical engineering
  • Porous GaN
  • 114 Physical sciences

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