Fabrication of Silicon Nanostructures with Electric Discharge

Niina Suni, Markus Haapala, Elina Färm, Mikko Ritala, Tapio Kotiaho, Lauri Sainiemi, Sami Franssila, Risto Kostiainen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication13th International Conference on Miniaturized Systems for Chemistry and Life Sciences
    Number of pages3
    Publication date2009
    Pages254-256
    Publication statusPublished - 2009
    MoE publication typeA4 Article in conference proceedings
    EventInternational Conference on Miniaturized Systems for Chemistry and Life Sciences - Jeju, Korea, Republic of
    Duration: 1 Nov 20095 Nov 2009
    Conference number: 13

    Fields of Science

    • 116 Chemical sciences
    • 317 Pharmacy

    Cite this

    Suni, N., Haapala, M., Färm, E., Ritala, M., Kotiaho, T., Sainiemi, L., ... Kostiainen, R. (2009). Fabrication of Silicon Nanostructures with Electric Discharge. In 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 254-256)
    Suni, Niina ; Haapala, Markus ; Färm, Elina ; Ritala, Mikko ; Kotiaho, Tapio ; Sainiemi, Lauri ; Franssila, Sami ; Kostiainen, Risto. / Fabrication of Silicon Nanostructures with Electric Discharge. 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences. 2009. pp. 254-256
    @inproceedings{4f4c5bee22584d319100fbc11ea3f8ae,
    title = "Fabrication of Silicon Nanostructures with Electric Discharge",
    keywords = "116 Chemical sciences, 317 Pharmacy",
    author = "Niina Suni and Markus Haapala and Elina F{\"a}rm and Mikko Ritala and Tapio Kotiaho and Lauri Sainiemi and Sami Franssila and Risto Kostiainen",
    note = "Volume: Proceeding volume:",
    year = "2009",
    language = "English",
    pages = "254--256",
    booktitle = "13th International Conference on Miniaturized Systems for Chemistry and Life Sciences",

    }

    Suni, N, Haapala, M, Färm, E, Ritala, M, Kotiaho, T, Sainiemi, L, Franssila, S & Kostiainen, R 2009, Fabrication of Silicon Nanostructures with Electric Discharge. in 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences. pp. 254-256, International Conference on Miniaturized Systems for Chemistry and Life Sciences, Jeju, Korea, Republic of, 01/11/2009.

    Fabrication of Silicon Nanostructures with Electric Discharge. / Suni, Niina; Haapala, Markus; Färm, Elina; Ritala, Mikko; Kotiaho, Tapio; Sainiemi, Lauri; Franssila, Sami; Kostiainen, Risto.

    13th International Conference on Miniaturized Systems for Chemistry and Life Sciences. 2009. p. 254-256.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    TY - GEN

    T1 - Fabrication of Silicon Nanostructures with Electric Discharge

    AU - Suni, Niina

    AU - Haapala, Markus

    AU - Färm, Elina

    AU - Ritala, Mikko

    AU - Kotiaho, Tapio

    AU - Sainiemi, Lauri

    AU - Franssila, Sami

    AU - Kostiainen, Risto

    N1 - Volume: Proceeding volume:

    PY - 2009

    Y1 - 2009

    KW - 116 Chemical sciences

    KW - 317 Pharmacy

    M3 - Conference contribution

    SP - 254

    EP - 256

    BT - 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences

    ER -

    Suni N, Haapala M, Färm E, Ritala M, Kotiaho T, Sainiemi L et al. Fabrication of Silicon Nanostructures with Electric Discharge. In 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences. 2009. p. 254-256