FACTORS AFFECTING THE DISTRIBUTIONS OF IMPLANTED IONS

M HAUTALA, R LAPPALAINEN

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume28
Pages (from-to)519-526
Number of pages8
ISSN0168-583X
Publication statusPublished - 1987
MoE publication typeA1 Journal article-refereed

Fields of Science

  • 114 Physical sciences
  • 117 Geography, Environmental sciences

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