Formation and stability of lanthanum oxide thin films deposited from beta-diketonate precursor

Minna Nieminen, Matti Putkonen, Lauri Niinistö

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
JournalApplied Surface Science
Volume174
Issue number2
Pages (from-to)155-165
ISSN0169-4332
Publication statusPublished - 2001
Externally publishedYes
MoE publication typeA1 Journal article-refereed

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