Formation of Meta-Stable SiOx by Ion Beam Mixing for Self-Assembly of a Si Nanodot

Research output: Conference materialsPoster

Original languageEnglish
Publication statusPublished - 15 Feb 2017
EventTowards Reality in Nanoscale Materials IX - Levi K5, Levi, Finland
Duration: 13 Feb 201716 Feb 2017
Conference number: 9
http://trnm.aalto.fi/

Workshop

WorkshopTowards Reality in Nanoscale Materials IX
Abbreviated titleTRNM-IX
CountryFinland
CityLevi
Period13/02/201716/02/2017
Internet address

Fields of Science

  • 114 Physical sciences

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