Glass microfabricated nebulizer chip for mass spectrometry

Ville Saarela, Markus Haapala, Risto Kostiainen, Tapio Kotiaho, Sami Franssila

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review


A robust semiconductor micropillar array electrospray ionization (ESI) chip has been
developed, fabricated and tested. The silicon chip has spontaneous transfer of liquids. Capillary forces and hydrostatic pressure affects the flow rate. ESI could be formed easily by applying high voltage to the chip. Via ESI interface the chip can be connected to a mass spectrometer.
Original languageEnglish
Title of host publicationProceedings of µTAS 2006 Conference
Number of pages3
Publication date2006
Publication statusPublished - 2006
MoE publication typeA4 Article in conference proceedings
EventMicro Total Analysis Systems 2006 - Tokio, Japan
Duration: 5 Nov 20069 Nov 2006

Fields of Science

  • 116 Chemical sciences
  • 317 Pharmacy

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