H-1(N-15,ALPHA-GAMMA)C-12 NUCLEAR-RESONANCE BROADENING MEASUREMENTS OF HYDROGEN INCORPORATION DURING PLASMA-ETCHING OF GAAS AND GAXIN(1-X)AS QUANTUM-WELLS

L  PERSSON; H J  WHITLOW; J  KEINONEN; P  TORRI; I  MAXIMOV; L  SAMUELSSON; J  KNOX; K G  MALMQVIST

H-1(N-15,ALPHA-GAMMA)C-12 NUCLEAR-RESONANCE BROADENING MEASUREMENTS OF HYDROGEN INCORPORATION DURING PLASMA-ETCHING OF GAAS AND GAXIN(1-X)AS QUANTUM-WELLS

L PERSSON, H J WHITLOW, J KEINONEN, P TORRI, I MAXIMOV, L SAMUELSSON, J KNOX, K G MALMQVIST

Department of Physics

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	English
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	89
Pages (from-to)	346-349
Number of pages	4
ISSN	0168-583X
Publication status	Published - 1994
MoE publication type	A4 Article in conference proceedings
Event	Unknown host publication - , Netherlands Duration: 1 Jan 1800 → …

Fields of Science

DEFECTS
114 Physical sciences
117 Geography, Environmental sciences

Cite this

PERSSON, L., WHITLOW, H. J., KEINONEN, J., TORRI, P., MAXIMOV, I., SAMUELSSON, L., KNOX, J., & MALMQVIST, K. G. (1994). H-1(N-15,ALPHA-GAMMA)C-12 NUCLEAR-RESONANCE BROADENING MEASUREMENTS OF HYDROGEN INCORPORATION DURING PLASMA-ETCHING OF GAAS AND GAXIN(1-X)AS QUANTUM-WELLS. Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 89, 346-349.

PERSSON, L ; WHITLOW, H J ; KEINONEN, J ; TORRI, P ; MAXIMOV, I ; SAMUELSSON, L ; KNOX, J ; MALMQVIST, K G . / H-1(N-15,ALPHA-GAMMA)C-12 NUCLEAR-RESONANCE BROADENING MEASUREMENTS OF HYDROGEN INCORPORATION DURING PLASMA-ETCHING OF GAAS AND GAXIN(1-X)AS QUANTUM-WELLS. In: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 1994 ; Vol. 89. pp. 346-349.

@article{27cbfbed4b3b41749ae64195a67f0e9a,

title = "H-1(N-15,ALPHA-GAMMA)C-12 NUCLEAR-RESONANCE BROADENING MEASUREMENTS OF HYDROGEN INCORPORATION DURING PLASMA-ETCHING OF GAAS AND GAXIN(1-X)AS QUANTUM-WELLS",

keywords = "DEFECTS, 114 Physical sciences, 117 Geography, Environmental sciences",

author = "L PERSSON and WHITLOW, {H J} and J KEINONEN and P TORRI and I MAXIMOV and L SAMUELSSON and J KNOX and MALMQVIST, {K G}",

note = " Volume: 89 ; Unknown host publication ; Conference date: 01-01-1800",

year = "1994",

language = "English",

volume = "89",

pages = "346--349",

journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

}

PERSSON, L, WHITLOW, HJ, KEINONEN, J, TORRI, P, MAXIMOV, I, SAMUELSSON, L, KNOX, J & MALMQVIST, KG 1994, 'H-1(N-15,ALPHA-GAMMA)C-12 NUCLEAR-RESONANCE BROADENING MEASUREMENTS OF HYDROGEN INCORPORATION DURING PLASMA-ETCHING OF GAAS AND GAXIN(1-X)AS QUANTUM-WELLS', Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, vol. 89, pp. 346-349.

H-1(N-15,ALPHA-GAMMA)C-12 NUCLEAR-RESONANCE BROADENING MEASUREMENTS OF HYDROGEN INCORPORATION DURING PLASMA-ETCHING OF GAAS AND GAXIN(1-X)AS QUANTUM-WELLS. / PERSSON, L ; WHITLOW, H J ; KEINONEN, J ; TORRI, P ; MAXIMOV, I ; SAMUELSSON, L ; KNOX, J ; MALMQVIST, K G .

In: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 89, 1994, p. 346-349.

Research output: Contribution to journal › Conference article › Scientific › peer-review

TY - JOUR

T1 - H-1(N-15,ALPHA-GAMMA)C-12 NUCLEAR-RESONANCE BROADENING MEASUREMENTS OF HYDROGEN INCORPORATION DURING PLASMA-ETCHING OF GAAS AND GAXIN(1-X)AS QUANTUM-WELLS

AU - PERSSON, L

AU - WHITLOW, H J

AU - KEINONEN, J

AU - TORRI, P

AU - MAXIMOV, I

AU - SAMUELSSON, L

AU - KNOX, J

AU - MALMQVIST, K G

N1 - Volume: 89

PY - 1994

Y1 - 1994

KW - DEFECTS

KW - 114 Physical sciences

KW - 117 Geography, Environmental sciences

M3 - Conference article

VL - 89

SP - 346

EP - 349

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

T2 - Unknown host publication

Y2 - 1 January 1800

ER -