H-1(N-15,ALPHA-GAMMA)C-12 NUCLEAR-RESONANCE BROADENING MEASUREMENTS OF HYDROGEN INCORPORATION DURING PLASMA-ETCHING OF GAAS AND GAXIN(1-X)AS QUANTUM-WELLS

L PERSSON, H J WHITLOW, J KEINONEN, P TORRI, I MAXIMOV, L SAMUELSSON, J KNOX, K G MALMQVIST

Research output: Contribution to journalConference articleScientificpeer-review

Original languageEnglish
JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume89
Pages (from-to)346-349
Number of pages4
ISSN0168-583X
Publication statusPublished - 1994
MoE publication typeA4 Article in conference proceedings
EventUnknown host publication - , Netherlands
Duration: 1 Jan 1800 → …

Fields of Science

  • DEFECTS
  • 114 Physical sciences
  • 117 Geography, Environmental sciences

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