High-quality slot waveguide ring resonator based on atomic layer deposition

A. Autere, L. Karvonen, A. Saynatjoki, M. Roussey, E. Färm, M. Kemell, X. Tu, T. Y. Liow, G. Q. Lo, M. Ritala, M. Leskelä, S. Honkanen, Z. Sun

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

Original languageEnglish
Title of host publicationSILICON PHOTONICS X
EditorsGT Reed, MR Watts
Number of pages7
PublisherSPIE
Publication date2015
Article number93671J
ISBN (Print)978-1-62841-457-8
DOIs
Publication statusPublished - 2015
MoE publication typeB3 Article in conference proceedings
EventSilicon Photonics - San Francisco, United States
Duration: 9 Feb 201512 Feb 2015
Conference number: X

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume9367
ISSN (Print)0277-786X

Fields of Science

  • slot waveguide
  • ring resonator
  • atomic layer deposition
  • SILICON
  • MODULATOR
  • 114 Physical sciences
  • 116 Chemical sciences

Cite this

Autere, A., Karvonen, L., Saynatjoki, A., Roussey, M., Färm, E., Kemell, M., ... Sun, Z. (2015). High-quality slot waveguide ring resonator based on atomic layer deposition. In GT. Reed, & MR. Watts (Eds.), SILICON PHOTONICS X [93671J] (Proceedings of SPIE ; Vol. 9367 ). SPIE. https://doi.org/10.1117/12.2076903
Autere, A. ; Karvonen, L. ; Saynatjoki, A. ; Roussey, M. ; Färm, E. ; Kemell, M. ; Tu, X. ; Liow, T. Y. ; Lo, G. Q. ; Ritala, M. ; Leskelä, M. ; Honkanen, S. ; Sun, Z. / High-quality slot waveguide ring resonator based on atomic layer deposition. SILICON PHOTONICS X . editor / GT Reed ; MR Watts. SPIE, 2015. (Proceedings of SPIE ).
@inproceedings{70205851b4094a1db9aa104c27672982,
title = "High-quality slot waveguide ring resonator based on atomic layer deposition",
keywords = "slot waveguide, ring resonator, atomic layer deposition, SILICON, MODULATOR, 114 Physical sciences, 116 Chemical sciences",
author = "A. Autere and L. Karvonen and A. Saynatjoki and M. Roussey and E. F{\"a}rm and M. Kemell and X. Tu and Liow, {T. Y.} and Lo, {G. Q.} and M. Ritala and M. Leskel{\"a} and S. Honkanen and Z. Sun",
note = "Volume: Proceeding volume:",
year = "2015",
doi = "10.1117/12.2076903",
language = "English",
isbn = "978-1-62841-457-8",
series = "Proceedings of SPIE",
publisher = "SPIE",
editor = "GT Reed and MR Watts",
booktitle = "SILICON PHOTONICS X",
address = "International",

}

Autere, A, Karvonen, L, Saynatjoki, A, Roussey, M, Färm, E, Kemell, M, Tu, X, Liow, TY, Lo, GQ, Ritala, M, Leskelä, M, Honkanen, S & Sun, Z 2015, High-quality slot waveguide ring resonator based on atomic layer deposition. in GT Reed & MR Watts (eds), SILICON PHOTONICS X ., 93671J, Proceedings of SPIE , vol. 9367 , SPIE, Silicon Photonics, San Francisco, United States, 09/02/2015. https://doi.org/10.1117/12.2076903

High-quality slot waveguide ring resonator based on atomic layer deposition. / Autere, A.; Karvonen, L.; Saynatjoki, A.; Roussey, M.; Färm, E.; Kemell, M.; Tu, X.; Liow, T. Y.; Lo, G. Q.; Ritala, M.; Leskelä, M.; Honkanen, S.; Sun, Z.

SILICON PHOTONICS X . ed. / GT Reed; MR Watts. SPIE, 2015. 93671J (Proceedings of SPIE ; Vol. 9367 ).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

TY - GEN

T1 - High-quality slot waveguide ring resonator based on atomic layer deposition

AU - Autere, A.

AU - Karvonen, L.

AU - Saynatjoki, A.

AU - Roussey, M.

AU - Färm, E.

AU - Kemell, M.

AU - Tu, X.

AU - Liow, T. Y.

AU - Lo, G. Q.

AU - Ritala, M.

AU - Leskelä, M.

AU - Honkanen, S.

AU - Sun, Z.

N1 - Volume: Proceeding volume:

PY - 2015

Y1 - 2015

KW - slot waveguide

KW - ring resonator

KW - atomic layer deposition

KW - SILICON

KW - MODULATOR

KW - 114 Physical sciences

KW - 116 Chemical sciences

U2 - 10.1117/12.2076903

DO - 10.1117/12.2076903

M3 - Conference contribution

SN - 978-1-62841-457-8

T3 - Proceedings of SPIE

BT - SILICON PHOTONICS X

A2 - Reed, GT

A2 - Watts, MR

PB - SPIE

ER -

Autere A, Karvonen L, Saynatjoki A, Roussey M, Färm E, Kemell M et al. High-quality slot waveguide ring resonator based on atomic layer deposition. In Reed GT, Watts MR, editors, SILICON PHOTONICS X . SPIE. 2015. 93671J. (Proceedings of SPIE ). https://doi.org/10.1117/12.2076903