Impact of rapid thermal annealing of Ti/TiN bilayers on subsequent chemical vapor deposition of tungsten

A Mouroux, R Palmans, J Keinonen, SL Zhang, K Maex, S Petersson

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationUnknown host publication
EditorsKN Tu, JW Mayer, JM Poate, LJ Chen
Number of pages6
Publication date1996
Pages365-370
Publication statusPublished - 1996
MoE publication typeA4 Article in conference proceedings

Publication series

NameMATERIALS RESEARCH SOCIETY CONFERENCE PROCEEDINGS
PublisherMATERIALS RESEARCH SOC
Volume427
ISSN (Print)0886-7860

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