@article{641e62bbf9154eb594d330941823ecbd,
title = "In Situ Reaction Mechanism Studies on Lithium Hexadimethyldisilazide and Ozone Atomic Layer Deposition Process for Lithium Silicate",
keywords = "QUADRUPOLE MASS-SPECTROMETRY, THIN-FILMS, IONIC-CONDUCTIVITY, AL2O3, WATER, GROWTH, FTIR, METASILICATE, FABRICATION, OXIDATION, 116 Chemical sciences",
author = "Yoann Tomczak and Kjell Knapas and Markku Sundberg and Markku Leskel{\"a} and Mikko Ritala",
year = "2013",
month = jul,
day = "11",
doi = "10.1021/jp312309g",
language = "English",
volume = "117",
pages = "14241--14246",
journal = "Journal of Physical Chemistry C",
issn = "1932-7447",
publisher = "American Chemical Society",
number = "27",
}