@article{32dc30b69ce04460a1cb3ce18c76b306,
title = "In Situ Studies on Reaction Mechanisms in Atomic Layer Deposition",
keywords = "atomic layer deposition, reaction mechanism, ligand exchange reaction, in situ, mass spectrometry, quartz crystal microbalance, infrared spectrometry, OXIDE THIN-FILMS, QUARTZ-CRYSTAL MICROBALANCE, SURFACE-REACTION MECHANISMS, BINARY REACTION SEQUENCE, TRANSMISSION FTIR SPECTROSCOPY, QUADRUPOLE MASS-SPECTROMETRY, GAAS GROWTH-PROCESS, REFLECTANCE-DIFFERENCE SPECTROSCOPY, INSITU OPTICAL CHARACTERIZATION, TERMINATED SI(100) SURFACES, 116 Chemical sciences, 114 Physical sciences",
author = "Kjell Knapas and Mikko Ritala",
year = "2013",
month = jan,
day = "1",
doi = "10.1080/10408436.2012.693460",
language = "English",
volume = "38",
pages = "167--202",
journal = "Critical Reviews in Solid State & Materials Sciences",
issn = "1040-8436",
publisher = "Taylor & Francis",
number = "3",
}