Industrial applications of atomic layer deposition

Mikko Ritala, Jaakko Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    JournalECS transactions
    Volume25
    Issue number8
    Pages (from-to)641-652
    Number of pages12
    ISSN1938-5862
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

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