Influence of precursor chemistry and growth temperature on the electrical properties of SrTiO3-based metal-insulator-metal capacitors grown by atomic layer deposition

Hector García; Helena Castán; Antonio Gómez; Salvador Dueñas; Luis Bailón; Kaupo Kukli; Maarit Kariniemi; Marianna Leena Kemell; Jaakko Niinistö; Mikko Ritala; Markku Leskelä

doi:10.1116/1.3525280

Influence of precursor chemistry and growth temperature on the electrical properties of SrTiO3-based metal-insulator-metal capacitors grown by atomic layer deposition

Hector García, Helena Castán, Antonio Gómez, Salvador Dueñas, Luis Bailón, Kaupo Kukli, Maarit Kariniemi, Marianna Leena Kemell, Jaakko Niinistö, Mikko Ritala, Markku Leskelä

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Journal	Journal of vacuum science and technology. B., Nanotechnology & microelectronics
Volume	29
Issue number	1
Pages (from-to)	01AC04-1 – 01AC04-5
Number of pages	5
ISSN	2166-2746
DOIs	https://doi.org/10.1116/1.3525280
Publication status	Published - 2011
MoE publication type	A1 Journal article-refereed

Fields of Science

116 Chemical sciences

Access to Document

10.1116/1.3525280

Cite this

García, H., Castán, H., Gómez, A., Dueñas, S., Bailón, L., Kukli, K., Kariniemi, M., Kemell, M. L., Niinistö, J., Ritala, M., & Leskelä, M. (2011). Influence of precursor chemistry and growth temperature on the electrical properties of SrTiO3-based metal-insulator-metal capacitors grown by atomic layer deposition. Journal of vacuum science and technology. B., Nanotechnology & microelectronics, 29(1), 01AC04-1 – 01AC04-5. https://doi.org/10.1116/1.3525280

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keywords = "116 Chemical sciences",

author = "Hector Garc{\'i}a and Helena Cast{\'a}n and Antonio G{\'o}mez and Salvador Due{\~n}as and Luis Bail{\'o}n and Kaupo Kukli and Maarit Kariniemi and Kemell, {Marianna Leena} and Jaakko Niinist{\"o} and Mikko Ritala and Markku Leskel{\"a}",

year = "2011",

doi = "10.1116/1.3525280",

language = "English",

volume = "29",

pages = "01AC04--1 – 01AC04--5",

journal = "Journal of vacuum science and technology. B., Nanotechnology & microelectronics",

issn = "2166-2746",

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García, H, Castán, H, Gómez, A, Dueñas, S, Bailón, L, Kukli, K, Kariniemi, M, Kemell, ML, Niinistö, J, Ritala, M & Leskelä, M 2011, 'Influence of precursor chemistry and growth temperature on the electrical properties of SrTiO3-based metal-insulator-metal capacitors grown by atomic layer deposition', Journal of vacuum science and technology. B., Nanotechnology & microelectronics, vol. 29, no. 1, pp. 01AC04-1 – 01AC04-5. https://doi.org/10.1116/1.3525280

Influence of precursor chemistry and growth temperature on the electrical properties of SrTiO3-based metal-insulator-metal capacitors grown by atomic layer deposition. / García, Hector; Castán, Helena; Gómez, Antonio et al.
In: Journal of vacuum science and technology. B., Nanotechnology & microelectronics, Vol. 29, No. 1, 2011, p. 01AC04-1 – 01AC04-5.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Influence of precursor chemistry and growth temperature on the electrical properties of SrTiO3-based metal-insulator-metal capacitors grown by atomic layer deposition

AU - García, Hector

AU - Castán, Helena

AU - Gómez, Antonio

AU - Dueñas, Salvador

AU - Bailón, Luis

AU - Kukli, Kaupo

AU - Kariniemi, Maarit

AU - Kemell, Marianna Leena

AU - Niinistö, Jaakko

AU - Ritala, Mikko

AU - Leskelä, Markku

PY - 2011

Y1 - 2011

KW - 116 Chemical sciences

U2 - 10.1116/1.3525280

DO - 10.1116/1.3525280

M3 - Article

SN - 2166-2746

VL - 29

SP - 01AC04-1 – 01AC04-5

JO - Journal of vacuum science and technology. B., Nanotechnology & microelectronics

JF - Journal of vacuum science and technology. B., Nanotechnology & microelectronics

IS - 1

ER -

García H, Castán H, Gómez A, Dueñas S, Bailón L, Kukli K et al. Influence of precursor chemistry and growth temperature on the electrical properties of SrTiO3-based metal-insulator-metal capacitors grown by atomic layer deposition. Journal of vacuum science and technology. B., Nanotechnology & microelectronics. 2011;29(1):01AC04-1 – 01AC04-5. doi: 10.1116/1.3525280