Intercalation of Lithium Ions from Gaseous Precursors into beta-MnO2 Thin Films Deposited by Atomic Layer Deposition

Heta Nieminen; Ville Miikkulainen; Daniel Settipani; Laura Simonelli; Philipp Hönicke; Claudia  Zech; Yves Kayser; Burkhard Beckhoff; Ari-Pekka Honkanen; Mikko Heikkilä; Kenichiro Mizohata; Nils Kristoffer Meinander; Oili M. E. Ylivaara; Simo Huotari; Mikko Ritala

doi:10.1021/acs.jpcc.9b03039

Intercalation of Lithium Ions from Gaseous Precursors into beta-MnO2 Thin Films Deposited by Atomic Layer Deposition

Heta Nieminen, Ville Miikkulainen, Daniel Settipani, Laura Simonelli, Philipp Hönicke, Claudia Zech, Yves Kayser, Burkhard Beckhoff, Ari-Pekka Honkanen, Mikko Heikkilä, Kenichiro Mizohata, Nils Kristoffer Meinander, Oili M. E. Ylivaara, Simo Huotari, Mikko Ritala

Research output: Contribution to journal › Article › Scientific › peer-review

Abstract

LiMn2O4 is a promising candidate for a cathode material in lithium-ion batteries because of its ability to intercalate lithium ions reversibly through its three-dimensional manganese oxide network. One of the promising techniques for depositing LiMn2O4 thin-film cathodes is atomic layer deposition (ALD). Because of its unparalleled film thickness control and film conformality, ALD helps to fulfill the industry demands for smaller devices, nanostructured electrodes, and all-solid-state batteries. In this work, the intercalation mechanism of Li+ ions into an ALD-grown beta-MnO2 thin film was studied. Samples were prepared by pulsing (LiOBu)-Bu-t and H2O for different cycle numbers onto about 100 nm thick MnO2 films at 225 degrees C and characterized with X-ray absorption spectroscopy, X-ray diffraction, X-ray reflectivity, time-of-flight elastic recoil detection analysis, and residual stress measurements. It is proposed that for

Original language	English
Journal	Journal of Physical Chemistry C
Volume	123
Issue number	25
Pages (from-to)	15802-15814
Number of pages	13
ISSN	1932-7447
DOIs	https://doi.org/10.1021/acs.jpcc.9b03039
Publication status	Published - 27 Jun 2019
MoE publication type	A1 Journal article-refereed

Fields of Science

CATHODE
ELECTROCHEMICAL CHARACTERIZATION
ELECTRONIC-STRUCTURE
FINE-STRUCTURE
INSERTION
LOCAL-STRUCTURE
MANGANESE OXIDE
SPINEL LIMN2O4
STRUCTURAL PHASE-TRANSITION
X-RAY-ABSORPTION
114 Physical sciences
116 Chemical sciences

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10.1021/acs.jpcc.9b03039Licence: CC BY

acs.jpcc.9b03039Final published version, 2.51 MBLicence: CC BY

X-ray Laboratory
Simo Huotari (Manager)
Department of Physics
Facility/equipment: Research Laboratory

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Nieminen, H., Miikkulainen, V., Settipani, D., Simonelli, L., Hönicke, P., Zech, C., Kayser, Y., Beckhoff, B., Honkanen, A-P., Heikkilä, M., Mizohata, K., Meinander, N. K., Ylivaara, O. M. E., Huotari, S., & Ritala, M. (2019). Intercalation of Lithium Ions from Gaseous Precursors into beta-MnO2 Thin Films Deposited by Atomic Layer Deposition. Journal of Physical Chemistry C, 123(25), 15802-15814. https://doi.org/10.1021/acs.jpcc.9b03039

Nieminen, Heta ; Miikkulainen, Ville ; Settipani, Daniel ; Simonelli, Laura ; Hönicke, Philipp ; Zech, Claudia ; Kayser, Yves ; Beckhoff, Burkhard ; Honkanen, Ari-Pekka ; Heikkilä, Mikko ; Mizohata, Kenichiro ; Meinander, Nils Kristoffer ; Ylivaara, Oili M. E. ; Huotari, Simo ; Ritala, Mikko. / Intercalation of Lithium Ions from Gaseous Precursors into beta-MnO2 Thin Films Deposited by Atomic Layer Deposition. In: Journal of Physical Chemistry C. 2019 ; Vol. 123, No. 25. pp. 15802-15814.

@article{960ffd7f57a345358887d20c0c153e67,

title = "Intercalation of Lithium Ions from Gaseous Precursors into beta-MnO2 Thin Films Deposited by Atomic Layer Deposition",

abstract = "LiMn2O4 is a promising candidate for a cathode material in lithium-ion batteries because of its ability to intercalate lithium ions reversibly through its three-dimensional manganese oxide network. One of the promising techniques for depositing LiMn2O4 thin-film cathodes is atomic layer deposition (ALD). Because of its unparalleled film thickness control and film conformality, ALD helps to fulfill the industry demands for smaller devices, nanostructured electrodes, and all-solid-state batteries. In this work, the intercalation mechanism of Li+ ions into an ALD-grown beta-MnO2 thin film was studied. Samples were prepared by pulsing (LiOBu)-Bu-t and H2O for different cycle numbers onto about 100 nm thick MnO2 films at 225 degrees C and characterized with X-ray absorption spectroscopy, X-ray diffraction, X-ray reflectivity, time-of-flight elastic recoil detection analysis, and residual stress measurements. It is proposed that for",

keywords = "CATHODE, ELECTROCHEMICAL CHARACTERIZATION, ELECTRONIC-STRUCTURE, FINE-STRUCTURE, INSERTION, LOCAL-STRUCTURE, MANGANESE OXIDE, SPINEL LIMN2O4, STRUCTURAL PHASE-TRANSITION, X-RAY-ABSORPTION, 114 Physical sciences, 116 Chemical sciences",

author = "Heta Nieminen and Ville Miikkulainen and Daniel Settipani and Laura Simonelli and Philipp H{\"o}nicke and Claudia Zech and Yves Kayser and Burkhard Beckhoff and Ari-Pekka Honkanen and Mikko Heikkil{\"a} and Kenichiro Mizohata and Meinander, {Nils Kristoffer} and Ylivaara, {Oili M. E.} and Simo Huotari and Mikko Ritala",

year = "2019",

month = jun,

day = "27",

doi = "10.1021/acs.jpcc.9b03039",

language = "English",

volume = "123",

pages = "15802--15814",

journal = "Journal of Physical Chemistry C",

issn = "1932-7447",

publisher = "American Chemical Society",

number = "25",

}

Nieminen, H , Miikkulainen, V, Settipani, D, Simonelli, L, Hönicke, P, Zech, C, Kayser, Y, Beckhoff, B, Honkanen, A-P, Heikkilä, M , Mizohata, K, Meinander, NK, Ylivaara, OME, Huotari, S & Ritala, M 2019, 'Intercalation of Lithium Ions from Gaseous Precursors into beta-MnO2 Thin Films Deposited by Atomic Layer Deposition', Journal of Physical Chemistry C, vol. 123, no. 25, pp. 15802-15814. https://doi.org/10.1021/acs.jpcc.9b03039

Intercalation of Lithium Ions from Gaseous Precursors into beta-MnO2 Thin Films Deposited by Atomic Layer Deposition. / Nieminen, Heta ; Miikkulainen, Ville; Settipani, Daniel; Simonelli, Laura; Hönicke, Philipp; Zech, Claudia ; Kayser, Yves; Beckhoff, Burkhard; Honkanen, Ari-Pekka; Heikkilä, Mikko ; Mizohata, Kenichiro; Meinander, Nils Kristoffer; Ylivaara, Oili M. E.; Huotari, Simo ; Ritala, Mikko.

In: Journal of Physical Chemistry C, Vol. 123, No. 25, 27.06.2019, p. 15802-15814.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Intercalation of Lithium Ions from Gaseous Precursors into beta-MnO2 Thin Films Deposited by Atomic Layer Deposition

AU - Nieminen, Heta

AU - Miikkulainen, Ville

AU - Settipani, Daniel

AU - Simonelli, Laura

AU - Hönicke, Philipp

AU - Zech, Claudia

AU - Kayser, Yves

AU - Beckhoff, Burkhard

AU - Honkanen, Ari-Pekka

AU - Heikkilä, Mikko

AU - Mizohata, Kenichiro

AU - Meinander, Nils Kristoffer

AU - Ylivaara, Oili M. E.

AU - Huotari, Simo

AU - Ritala, Mikko

PY - 2019/6/27

Y1 - 2019/6/27

N2 - LiMn2O4 is a promising candidate for a cathode material in lithium-ion batteries because of its ability to intercalate lithium ions reversibly through its three-dimensional manganese oxide network. One of the promising techniques for depositing LiMn2O4 thin-film cathodes is atomic layer deposition (ALD). Because of its unparalleled film thickness control and film conformality, ALD helps to fulfill the industry demands for smaller devices, nanostructured electrodes, and all-solid-state batteries. In this work, the intercalation mechanism of Li+ ions into an ALD-grown beta-MnO2 thin film was studied. Samples were prepared by pulsing (LiOBu)-Bu-t and H2O for different cycle numbers onto about 100 nm thick MnO2 films at 225 degrees C and characterized with X-ray absorption spectroscopy, X-ray diffraction, X-ray reflectivity, time-of-flight elastic recoil detection analysis, and residual stress measurements. It is proposed that for

AB - LiMn2O4 is a promising candidate for a cathode material in lithium-ion batteries because of its ability to intercalate lithium ions reversibly through its three-dimensional manganese oxide network. One of the promising techniques for depositing LiMn2O4 thin-film cathodes is atomic layer deposition (ALD). Because of its unparalleled film thickness control and film conformality, ALD helps to fulfill the industry demands for smaller devices, nanostructured electrodes, and all-solid-state batteries. In this work, the intercalation mechanism of Li+ ions into an ALD-grown beta-MnO2 thin film was studied. Samples were prepared by pulsing (LiOBu)-Bu-t and H2O for different cycle numbers onto about 100 nm thick MnO2 films at 225 degrees C and characterized with X-ray absorption spectroscopy, X-ray diffraction, X-ray reflectivity, time-of-flight elastic recoil detection analysis, and residual stress measurements. It is proposed that for

KW - CATHODE

KW - ELECTROCHEMICAL CHARACTERIZATION

KW - ELECTRONIC-STRUCTURE

KW - FINE-STRUCTURE

KW - INSERTION

KW - LOCAL-STRUCTURE

KW - MANGANESE OXIDE

KW - SPINEL LIMN2O4

KW - STRUCTURAL PHASE-TRANSITION

KW - X-RAY-ABSORPTION

KW - 114 Physical sciences

KW - 116 Chemical sciences

U2 - 10.1021/acs.jpcc.9b03039

DO - 10.1021/acs.jpcc.9b03039

M3 - Article

VL - 123

SP - 15802

EP - 15814

JO - Journal of Physical Chemistry C

JF - Journal of Physical Chemistry C

SN - 1932-7447

IS - 25

ER -

Intercalation of Lithium Ions from Gaseous Precursors into beta-MnO2 Thin Films Deposited by Atomic Layer Deposition

Abstract

Fields of Science

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Equipment

X-ray Laboratory

Cite this