Introduction: basic features and historical development of atomic layer deposition

Jaakko Niinistö, Lauri Niinistö

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Original languageEnglish
Title of host publicationAtomic Layer Deposition of Nanostructured Materials
EditorsNicola Pinna, Mato Knez
Number of pages11
Place of PublicationWeinheim
PublisherWiley-VCH
Publication date2012
Edition1st
ISBN (Print)978-3-527-32797-3
ISBN (Electronic)978-3-527-63993-9
Publication statusPublished - 2012
MoE publication typeA3 Book chapter

Fields of Science

  • 116 Chemical sciences

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