Ion-beam modification of semiconductors

Kai Nordlund, Sergei O Kucheyev

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Original languageEnglish
Title of host publicationCharacterisation and Control of Defects in Semiconductors
EditorsFilip Tuomisto
Number of pages49
Place of PublicationLondon
PublisherIET Institution of Engineering and Technology
Publication date2019
Pages451-499
ISBN (Print)978-1-78561-655-6
ISBN (Electronic)978-1-78561-656-3
DOIs
Publication statusPublished - 2019
MoE publication typeA3 Book chapter

Fields of Science

  • 114 Physical sciences

Cite this

Nordlund, K., & Kucheyev, S. O. (2019). Ion-beam modification of semiconductors. In F. Tuomisto (Ed.), Characterisation and Control of Defects in Semiconductors (pp. 451-499). London: IET Institution of Engineering and Technology. https://doi.org/10.1049/pbcs045e_ch10