Ion-beam modification of semiconductors

Kai Nordlund, Sergei O Kucheyev

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Original languageEnglish
Title of host publicationCharacterisation and Control of Defects in Semiconductors
EditorsFilip Tuomisto
Number of pages49
Place of PublicationLondon
PublisherIET Institution of Engineering and Technology
Publication date2019
ISBN (Print)978-1-78561-655-6
ISBN (Electronic)978-1-78561-656-3
Publication statusPublished - 2019
MoE publication typeA3 Book chapter

Fields of Science

  • 114 Physical sciences

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