Ion-beam modification of semiconductors

Kai Nordlund, Sergei O Kucheyev

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Original languageEnglish
Title of host publicationCharacterisation and Control of Defects in Semiconductors
EditorsFilip Tuomisto
Number of pages49
Place of PublicationLondon
PublisherIET Institution of Engineering and Technology
Publication date2019
Pages451-499
ISBN (Print)978-1-78561-655-6
ISBN (Electronic)978-1-78561-656-3
DOIs
Publication statusPublished - 2019
MoE publication typeA3 Book chapter

Fields of Science

  • 114 Physical sciences

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