Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition

Taivo Jogiaas, Roberts Zabels, Aile Tamm, Maido Merisalu, Irina Hussainova, Mikko Heikkilä, Hugo Maendar, Kaupo Kukli, Mikko Ritala, Markku Leskela

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
JournalSurface & Coatings Technology
Volume282
Pages (from-to)36-42
Number of pages7
ISSN0257-8972
DOIs
Publication statusPublished - 25 Nov 2015
MoE publication typeA1 Journal article-refereed

Fields of Science

  • Instrumented nano-indentation
  • Metal oxide nano-laminates
  • Mechanical properties
  • Thin film
  • Atomic layer deposition
  • CORROSION PROTECTION
  • HARD COATINGS
  • THIN-FILMS
  • NANOINDENTATION
  • EPITAXY
  • STEEL
  • 114 Physical sciences
  • 116 Chemical sciences

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