| Translated title of the contribution | A Method to Grow Nitride Thin Films |
|---|---|
| Original language | Finnish |
| Publication Year | 2002 |
| Publication status | Published - 2002 |
| MoE publication type | H1 Granted patent |
Fields of Science
- 116 Chemical sciences
Menetelmä metallinitridiohutkalvojen valmistamiseksi
Markku Leskelä, Mikko Ritala, Petra Alén , Marika Juppo
Research output: Patent