Microfabrication of Transfer Standards for Calibration of Optical Quality Assurance System

Aneliya  Karadzhinova; Maria  Berdova; Timo Eero Hilden; Jouni Kalevi Heino; Rauno Lauhakangas; Eija Tuominen; Sami  Franssila; Edward Haeggström; Ivan Vladislavov Kassamakov

Microfabrication of Transfer Standards for Calibration of Optical Quality Assurance System

Aneliya Karadzhinova, Maria Berdova, Timo Eero Hilden, Jouni Kalevi Heino, Rauno Lauhakangas, Eija Tuominen, Sami Franssila, Edward Haeggström, Ivan Vladislavov Kassamakov

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Abstract

Instrumentation of particle physics requires precisely engineered structures. Reliable quality assurance of detectors by calibrated tools is crucial. We developed and microfabricated transfer standards for lateral calibration of an optical scanning system employed for quality assurance of particle detectors. The standard was embodied as an array of cavities of specified depths and shapes. The fabrication involved common wet and dry silicon etching methods. The fabricated standards brought better than 2 μm lateral precision to rapid nondestructive QA work

Original language	English
Title of host publication	24th Micromechanics and Microsystems Europe Conference
Publication date	2013
Publication status	Published - 2013
MoE publication type	A4 Article in conference proceedings
Event	Micromechanics and Microsystems Europe Conference - Espoo, Finland Duration: 1 Sept 2013 → 4 Sept 2013 Conference number: 24

Fields of Science

114 Physical sciences
System calibration
Transfer standard
Microfabrication
MEMS
quality assurance

Cite this

@inproceedings{12094dc81998445d8634dcc1cf16072b,

title = "Microfabrication of Transfer Standards for Calibration of Optical Quality Assurance System",

abstract = "Instrumentation of particle physics requires precisely engineered structures. Reliable quality assurance of detectors by calibrated tools is crucial. We developed and microfabricated transfer standards for lateral calibration of an optical scanning system employed for quality assurance of particle detectors. The standard was embodied as an array of cavities of specified depths and shapes. The fabrication involved common wet and dry silicon etching methods. The fabricated standards brought better than 2 μm lateral precision to rapid nondestructive QA work",

keywords = "114 Physical sciences, System calibration , Transfer standard, Microfabrication, MEMS, quality assurance",

author = "Aneliya Karadzhinova and Maria Berdova and Hilden, {Timo Eero} and Heino, {Jouni Kalevi} and Rauno Lauhakangas and Eija Tuominen and Sami Franssila and Edward Haeggstr{\"o}m and Kassamakov, {Ivan Vladislavov}",

year = "2013",

language = "English",

booktitle = "24th Micromechanics and Microsystems Europe Conference",

note = "Micromechanics and Microsystems Europe Conference ; Conference date: 01-09-2013 Through 04-09-2013",

}

TY - GEN

T1 - Microfabrication of Transfer Standards for Calibration of Optical Quality Assurance System

AU - Karadzhinova, Aneliya

AU - Berdova, Maria

AU - Hilden, Timo Eero

AU - Heino, Jouni Kalevi

AU - Lauhakangas, Rauno

AU - Tuominen, Eija

AU - Franssila, Sami

AU - Haeggström, Edward

AU - Kassamakov, Ivan Vladislavov

N1 - Conference code: 24

PY - 2013

Y1 - 2013

N2 - Instrumentation of particle physics requires precisely engineered structures. Reliable quality assurance of detectors by calibrated tools is crucial. We developed and microfabricated transfer standards for lateral calibration of an optical scanning system employed for quality assurance of particle detectors. The standard was embodied as an array of cavities of specified depths and shapes. The fabrication involved common wet and dry silicon etching methods. The fabricated standards brought better than 2 μm lateral precision to rapid nondestructive QA work

AB - Instrumentation of particle physics requires precisely engineered structures. Reliable quality assurance of detectors by calibrated tools is crucial. We developed and microfabricated transfer standards for lateral calibration of an optical scanning system employed for quality assurance of particle detectors. The standard was embodied as an array of cavities of specified depths and shapes. The fabrication involved common wet and dry silicon etching methods. The fabricated standards brought better than 2 μm lateral precision to rapid nondestructive QA work

KW - 114 Physical sciences

KW - System calibration

KW - Transfer standard

KW - Microfabrication

KW - MEMS

KW - quality assurance

M3 - Conference contribution

BT - 24th Micromechanics and Microsystems Europe Conference

T2 - Micromechanics and Microsystems Europe Conference

Y2 - 1 September 2013 through 4 September 2013

ER -