Molecular dynamics simulation of helium ion implantation into silicon and its migration

Lei Liu, Zongwei Xu, Rongrong Li, Rui Zhu, Jun Xu, Junlei Zhao, Chao Wang, Kai Nordlund, Xiu Fu, Fengzhou Fang

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume456
Pages (from-to)53-59
Number of pages7
ISSN0168-583X
DOIs
Publication statusPublished - 1 Oct 2019
MoE publication typeA1 Journal article-refereed

Fields of Science

  • Molecular dynamics simulation
  • Ion implantation
  • Helium
  • Si
  • Annealing
  • BUBBLE FORMATION
  • HE-IMPLANTATION
  • CAVITIES
  • TEMPERATURE
  • MECHANISMS
  • EVOLUTION
  • DEFECTS
  • VOIDS
  • 114 Physical sciences

Cite this

@article{a518580c5fa6464cb6b23d4bcef31b02,
title = "Molecular dynamics simulation of helium ion implantation into silicon and its migration",
keywords = "Molecular dynamics simulation, Ion implantation, Helium, Si, Annealing, BUBBLE FORMATION, HE-IMPLANTATION, CAVITIES, TEMPERATURE, MECHANISMS, EVOLUTION, DEFECTS, VOIDS, 114 Physical sciences",
author = "Lei Liu and Zongwei Xu and Rongrong Li and Rui Zhu and Jun Xu and Junlei Zhao and Chao Wang and Kai Nordlund and Xiu Fu and Fengzhou Fang",
year = "2019",
month = "10",
day = "1",
doi = "10.1016/j.nimb.2019.06.034",
language = "English",
volume = "456",
pages = "53--59",
journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",

}

Molecular dynamics simulation of helium ion implantation into silicon and its migration. / Liu, Lei; Xu, Zongwei; Li, Rongrong; Zhu, Rui; Xu, Jun; Zhao, Junlei; Wang, Chao; Nordlund, Kai; Fu, Xiu; Fang, Fengzhou.

In: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 456, 01.10.2019, p. 53-59.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Molecular dynamics simulation of helium ion implantation into silicon and its migration

AU - Liu, Lei

AU - Xu, Zongwei

AU - Li, Rongrong

AU - Zhu, Rui

AU - Xu, Jun

AU - Zhao, Junlei

AU - Wang, Chao

AU - Nordlund, Kai

AU - Fu, Xiu

AU - Fang, Fengzhou

PY - 2019/10/1

Y1 - 2019/10/1

KW - Molecular dynamics simulation

KW - Ion implantation

KW - Helium

KW - Si

KW - Annealing

KW - BUBBLE FORMATION

KW - HE-IMPLANTATION

KW - CAVITIES

KW - TEMPERATURE

KW - MECHANISMS

KW - EVOLUTION

KW - DEFECTS

KW - VOIDS

KW - 114 Physical sciences

U2 - 10.1016/j.nimb.2019.06.034

DO - 10.1016/j.nimb.2019.06.034

M3 - Article

VL - 456

SP - 53

EP - 59

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -