@article{a518580c5fa6464cb6b23d4bcef31b02,
title = "Molecular dynamics simulation of helium ion implantation into silicon and its migration",
keywords = "Molecular dynamics simulation, Ion implantation, Helium, Si, Annealing, BUBBLE FORMATION, HE-IMPLANTATION, CAVITIES, TEMPERATURE, MECHANISMS, EVOLUTION, DEFECTS, VOIDS, 114 Physical sciences",
author = "Lei Liu and Zongwei Xu and Rongrong Li and Rui Zhu and Jun Xu and Junlei Zhao and Chao Wang and Kai Nordlund and Xiu Fu and Fengzhou Fang",
year = "2019",
month = oct,
day = "1",
doi = "10.1016/j.nimb.2019.06.034",
language = "English",
volume = "456",
pages = "53--59",
journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",
}